JPS57151179U - - Google Patents

Info

Publication number
JPS57151179U
JPS57151179U JP3763981U JP3763981U JPS57151179U JP S57151179 U JPS57151179 U JP S57151179U JP 3763981 U JP3763981 U JP 3763981U JP 3763981 U JP3763981 U JP 3763981U JP S57151179 U JPS57151179 U JP S57151179U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3763981U
Other languages
Japanese (ja)
Other versions
JPS6138863Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3763981U priority Critical patent/JPS6138863Y2/ja
Publication of JPS57151179U publication Critical patent/JPS57151179U/ja
Application granted granted Critical
Publication of JPS6138863Y2 publication Critical patent/JPS6138863Y2/ja
Expired legal-status Critical Current

Links

JP3763981U 1981-03-19 1981-03-19 Expired JPS6138863Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3763981U JPS6138863Y2 (enExample) 1981-03-19 1981-03-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3763981U JPS6138863Y2 (enExample) 1981-03-19 1981-03-19

Publications (2)

Publication Number Publication Date
JPS57151179U true JPS57151179U (enExample) 1982-09-22
JPS6138863Y2 JPS6138863Y2 (enExample) 1986-11-08

Family

ID=29834827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3763981U Expired JPS6138863Y2 (enExample) 1981-03-19 1981-03-19

Country Status (1)

Country Link
JP (1) JPS6138863Y2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11447861B2 (en) 2016-12-15 2022-09-20 Asm Ip Holding B.V. Sequential infiltration synthesis apparatus and a method of forming a patterned structure
US10770286B2 (en) 2017-05-08 2020-09-08 Asm Ip Holdings B.V. Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures
US10923344B2 (en) 2017-10-30 2021-02-16 Asm Ip Holding B.V. Methods for forming a semiconductor structure and related semiconductor structures
US11031242B2 (en) 2018-11-07 2021-06-08 Asm Ip Holding B.V. Methods for depositing a boron doped silicon germanium film
US12040199B2 (en) 2018-11-28 2024-07-16 Asm Ip Holding B.V. Substrate processing apparatus for processing substrates
USD975665S1 (en) 2019-05-17 2023-01-17 Asm Ip Holding B.V. Susceptor shaft
CN112309843A (zh) 2019-07-29 2021-02-02 Asm Ip私人控股有限公司 实现高掺杂剂掺入的选择性沉积方法
USD979506S1 (en) 2019-08-22 2023-02-28 Asm Ip Holding B.V. Insulator
KR20210024423A (ko) 2019-08-22 2021-03-05 에이에스엠 아이피 홀딩 비.브이. 홀을 구비한 구조체를 형성하기 위한 방법
US12469693B2 (en) 2019-09-17 2025-11-11 Asm Ip Holding B.V. Method of forming a carbon-containing layer and structure including the layer
KR102890638B1 (ko) 2019-11-05 2025-11-25 에이에스엠 아이피 홀딩 비.브이. 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템
US12040177B2 (en) 2020-08-18 2024-07-16 Asm Ip Holding B.V. Methods for forming a laminate film by cyclical plasma-enhanced deposition processes

Also Published As

Publication number Publication date
JPS6138863Y2 (enExample) 1986-11-08

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