JPS57149118A - Drilling method of fine hole - Google Patents

Drilling method of fine hole

Info

Publication number
JPS57149118A
JPS57149118A JP56034298A JP3429881A JPS57149118A JP S57149118 A JPS57149118 A JP S57149118A JP 56034298 A JP56034298 A JP 56034298A JP 3429881 A JP3429881 A JP 3429881A JP S57149118 A JPS57149118 A JP S57149118A
Authority
JP
Japan
Prior art keywords
hole
machining
fine diameter
diameter
fine hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56034298A
Other languages
English (en)
Inventor
Takashi Omae
Yasuyuki Yoshida
Satoshi Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP56034298A priority Critical patent/JPS57149118A/ja
Publication of JPS57149118A publication Critical patent/JPS57149118A/ja
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B23H9/14—Making holes

Landscapes

  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • Laser Beam Processing (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
JP56034298A 1981-03-10 1981-03-10 Drilling method of fine hole Pending JPS57149118A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56034298A JPS57149118A (en) 1981-03-10 1981-03-10 Drilling method of fine hole

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56034298A JPS57149118A (en) 1981-03-10 1981-03-10 Drilling method of fine hole

Publications (1)

Publication Number Publication Date
JPS57149118A true JPS57149118A (en) 1982-09-14

Family

ID=12410247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56034298A Pending JPS57149118A (en) 1981-03-10 1981-03-10 Drilling method of fine hole

Country Status (1)

Country Link
JP (1) JPS57149118A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990002020A1 (en) * 1988-08-30 1990-03-08 Fanuc Ltd Wire-cut electrical discharge machining apparatus
JPH07256521A (ja) * 1994-03-17 1995-10-09 Sakae Denshi Kogyo Kk 基板の小径穴加工方法及び装置
EP1577048A1 (de) * 2004-03-18 2005-09-21 Trotec Produktions- und Vertriebs GMBH Bearbeitungsvorrichtung mit zwei unterschiedlichen Bearbeitungswerkzeugen und Verfahren zum Steuern derselben
CN109732199A (zh) * 2019-02-25 2019-05-10 江苏大学 一种半导体材料激光电化学背向协同微加工方法及装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990002020A1 (en) * 1988-08-30 1990-03-08 Fanuc Ltd Wire-cut electrical discharge machining apparatus
US5084602A (en) * 1988-08-30 1992-01-28 Fanuc Ltd. Apparatus for selecting wire electrode type electrical discharge maching or laser machining
JPH07256521A (ja) * 1994-03-17 1995-10-09 Sakae Denshi Kogyo Kk 基板の小径穴加工方法及び装置
EP1577048A1 (de) * 2004-03-18 2005-09-21 Trotec Produktions- und Vertriebs GMBH Bearbeitungsvorrichtung mit zwei unterschiedlichen Bearbeitungswerkzeugen und Verfahren zum Steuern derselben
CN109732199A (zh) * 2019-02-25 2019-05-10 江苏大学 一种半导体材料激光电化学背向协同微加工方法及装置
CN109732199B (zh) * 2019-02-25 2020-11-20 江苏大学 一种半导体材料激光电化学背向协同微加工方法及装置

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