JPS57137835A - Leakage detector - Google Patents

Leakage detector

Info

Publication number
JPS57137835A
JPS57137835A JP2311281A JP2311281A JPS57137835A JP S57137835 A JPS57137835 A JP S57137835A JP 2311281 A JP2311281 A JP 2311281A JP 2311281 A JP2311281 A JP 2311281A JP S57137835 A JPS57137835 A JP S57137835A
Authority
JP
Japan
Prior art keywords
products
leakage
vessel
conveyed
pitch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2311281A
Other languages
Japanese (ja)
Inventor
Tamotsu Usami
Kanji Otsuka
Toshihiro Tsuboi
Shuichi Sugimoto
Takashi Araki
Mutsuo Fuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NITSUKAN DENSHI KK
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
NITSUKAN DENSHI KK
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NITSUKAN DENSHI KK, Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical NITSUKAN DENSHI KK
Priority to JP2311281A priority Critical patent/JPS57137835A/en
Publication of JPS57137835A publication Critical patent/JPS57137835A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To perform leakage tests of products to be teated automatically and efficiently by containing the products to be tested which are conveyed by a carrier into a sealed test space and subjecting the same to the leakage test. CONSTITUTION:Plural pieces of semiconductor products 10 which are subjected to the force feeding operation of gaseous helium are pitch-fed by each pitch in an arrow A direction by means of pitch feed holes 30 while they are kept held in the holding holes 26 of a carrier 14. These products are conveyed successively by each piece into a test vessel 12. The products 10 conveyed into the vessel 12 are contained in the sealed test space formed of the sealing rubber ring 18 of the vessel 12 and the sealing rubber ring 20 of a sealing cover 16. If a leakage defect exists in any product 10, gaseous helium leaks into the sealed test space and therefore this leaking gas is conducted through a conduit 22 into the body part of the tester, whereby the presence or absence of the leakage is detected. Since no direct force is exerted upon the products 10, the generation of the deformation defects of the products 10 is obviated.
JP2311281A 1981-02-20 1981-02-20 Leakage detector Pending JPS57137835A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2311281A JPS57137835A (en) 1981-02-20 1981-02-20 Leakage detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2311281A JPS57137835A (en) 1981-02-20 1981-02-20 Leakage detector

Publications (1)

Publication Number Publication Date
JPS57137835A true JPS57137835A (en) 1982-08-25

Family

ID=12101390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2311281A Pending JPS57137835A (en) 1981-02-20 1981-02-20 Leakage detector

Country Status (1)

Country Link
JP (1) JPS57137835A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2584495A1 (en) * 1985-07-04 1987-01-09 Cit Alcatel MACHINE FOR CHECKING THE SEALING OF WORKPIECES BY THE SAID WIPING METHOD.

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930158A (en) * 1972-07-31 1974-03-18
JPS5459191A (en) * 1977-10-19 1979-05-12 Toshiba Corp Method and apparatus for detection of minute leakage

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4930158A (en) * 1972-07-31 1974-03-18
JPS5459191A (en) * 1977-10-19 1979-05-12 Toshiba Corp Method and apparatus for detection of minute leakage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2584495A1 (en) * 1985-07-04 1987-01-09 Cit Alcatel MACHINE FOR CHECKING THE SEALING OF WORKPIECES BY THE SAID WIPING METHOD.
US4663963A (en) * 1985-07-04 1987-05-12 Alcatel Machine for leak testing parts by the "penetration" method

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