JPS5713668U - - Google Patents
Info
- Publication number
- JPS5713668U JPS5713668U JP9063780U JP9063780U JPS5713668U JP S5713668 U JPS5713668 U JP S5713668U JP 9063780 U JP9063780 U JP 9063780U JP 9063780 U JP9063780 U JP 9063780U JP S5713668 U JPS5713668 U JP S5713668U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9063780U JPS5842444Y2 (ja) | 1980-06-30 | 1980-06-30 | ウエハの支承装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9063780U JPS5842444Y2 (ja) | 1980-06-30 | 1980-06-30 | ウエハの支承装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5713668U true JPS5713668U (enExample) | 1982-01-23 |
| JPS5842444Y2 JPS5842444Y2 (ja) | 1983-09-26 |
Family
ID=29452636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9063780U Expired JPS5842444Y2 (ja) | 1980-06-30 | 1980-06-30 | ウエハの支承装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5842444Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0313577A (ja) * | 1989-06-08 | 1991-01-22 | Agency Of Ind Science & Technol | スパッタ装置の基板ホルダ |
-
1980
- 1980-06-30 JP JP9063780U patent/JPS5842444Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0313577A (ja) * | 1989-06-08 | 1991-01-22 | Agency Of Ind Science & Technol | スパッタ装置の基板ホルダ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5842444Y2 (ja) | 1983-09-26 |