JPS57136681U - - Google Patents

Info

Publication number
JPS57136681U
JPS57136681U JP2302281U JP2302281U JPS57136681U JP S57136681 U JPS57136681 U JP S57136681U JP 2302281 U JP2302281 U JP 2302281U JP 2302281 U JP2302281 U JP 2302281U JP S57136681 U JPS57136681 U JP S57136681U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2302281U
Other versions
JPH0118309Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1981023022U priority Critical patent/JPH0118309Y2/ja
Publication of JPS57136681U publication Critical patent/JPS57136681U/ja
Application granted granted Critical
Publication of JPH0118309Y2 publication Critical patent/JPH0118309Y2/ja
Expired legal-status Critical Current

Links

JP1981023022U 1981-02-20 1981-02-20 Expired JPH0118309Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981023022U JPH0118309Y2 (ja) 1981-02-20 1981-02-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981023022U JPH0118309Y2 (ja) 1981-02-20 1981-02-20

Publications (2)

Publication Number Publication Date
JPS57136681U true JPS57136681U (ja) 1982-08-26
JPH0118309Y2 JPH0118309Y2 (ja) 1989-05-29

Family

ID=29820791

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981023022U Expired JPH0118309Y2 (ja) 1981-02-20 1981-02-20

Country Status (1)

Country Link
JP (1) JPH0118309Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010129857A (ja) * 2008-11-28 2010-06-10 Sumco Corp 半導体ウェーハのスクライブ装置、およびそれを備えたスクライブシステム
JP6807619B1 (ja) * 2020-05-22 2021-01-06 ハイソル株式会社 プローバ装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173398U (ja) * 1978-05-26 1979-12-07

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54173398U (ja) * 1978-05-26 1979-12-07

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010129857A (ja) * 2008-11-28 2010-06-10 Sumco Corp 半導体ウェーハのスクライブ装置、およびそれを備えたスクライブシステム
JP6807619B1 (ja) * 2020-05-22 2021-01-06 ハイソル株式会社 プローバ装置
JP2021184427A (ja) * 2020-05-22 2021-12-02 ハイソル株式会社 プローバ装置

Also Published As

Publication number Publication date
JPH0118309Y2 (ja) 1989-05-29

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