JPS57136681U - - Google Patents
Info
- Publication number
- JPS57136681U JPS57136681U JP2302281U JP2302281U JPS57136681U JP S57136681 U JPS57136681 U JP S57136681U JP 2302281 U JP2302281 U JP 2302281U JP 2302281 U JP2302281 U JP 2302281U JP S57136681 U JPS57136681 U JP S57136681U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981023022U JPH0118309Y2 (https=) | 1981-02-20 | 1981-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981023022U JPH0118309Y2 (https=) | 1981-02-20 | 1981-02-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57136681U true JPS57136681U (https=) | 1982-08-26 |
| JPH0118309Y2 JPH0118309Y2 (https=) | 1989-05-29 |
Family
ID=29820791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981023022U Expired JPH0118309Y2 (https=) | 1981-02-20 | 1981-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0118309Y2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010129857A (ja) * | 2008-11-28 | 2010-06-10 | Sumco Corp | 半導体ウェーハのスクライブ装置、およびそれを備えたスクライブシステム |
| JP2021184427A (ja) * | 2020-05-22 | 2021-12-02 | ハイソル株式会社 | プローバ装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54173398U (https=) * | 1978-05-26 | 1979-12-07 |
-
1981
- 1981-02-20 JP JP1981023022U patent/JPH0118309Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54173398U (https=) * | 1978-05-26 | 1979-12-07 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010129857A (ja) * | 2008-11-28 | 2010-06-10 | Sumco Corp | 半導体ウェーハのスクライブ装置、およびそれを備えたスクライブシステム |
| JP2021184427A (ja) * | 2020-05-22 | 2021-12-02 | ハイソル株式会社 | プローバ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0118309Y2 (https=) | 1989-05-29 |