JPS57136346A - Internal wiring for semiconductor ic - Google Patents
Internal wiring for semiconductor icInfo
- Publication number
- JPS57136346A JPS57136346A JP2197281A JP2197281A JPS57136346A JP S57136346 A JPS57136346 A JP S57136346A JP 2197281 A JP2197281 A JP 2197281A JP 2197281 A JP2197281 A JP 2197281A JP S57136346 A JPS57136346 A JP S57136346A
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- layer
- film
- slits
- electromigration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE:To prevent electromigration caused disconnection by a method wherein belts of conductive films of different resistance are piled upon one another and the belt with the lowest resistance is separated into several small parts by slits. CONSTITUTION:A P type duffused layer 2 is formed on an N type Si substrate 1. The layer 2 is covered with an oxide film 3 provided with a window for establishing contact with the diffused layer 3. Through the window, a TiW film 4 difficult to effect electromigration in spite of high layer resistance is sandwiched between an Al film 5 in the form of a belt including a bonding pad 6 apt to effect electromigration in spite of its low layer resistance and the oxide film 3. The Al film 5 is separated into several parts by slits 7. The slits 7 cause a current to flow through parts of higher resistance but there is but a little increase in resistance, and migration is prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2197281A JPS57136346A (en) | 1981-02-17 | 1981-02-17 | Internal wiring for semiconductor ic |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2197281A JPS57136346A (en) | 1981-02-17 | 1981-02-17 | Internal wiring for semiconductor ic |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57136346A true JPS57136346A (en) | 1982-08-23 |
JPH0150104B2 JPH0150104B2 (en) | 1989-10-27 |
Family
ID=12069945
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2197281A Granted JPS57136346A (en) | 1981-02-17 | 1981-02-17 | Internal wiring for semiconductor ic |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57136346A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5397790A (en) * | 1977-02-07 | 1978-08-26 | Nec Corp | Semiconductor device |
JPS53118907A (en) * | 1977-03-28 | 1978-10-17 | Nec Corp | Auxiliary stand-by unit for time sharing communicating line |
-
1981
- 1981-02-17 JP JP2197281A patent/JPS57136346A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5397790A (en) * | 1977-02-07 | 1978-08-26 | Nec Corp | Semiconductor device |
JPS53118907A (en) * | 1977-03-28 | 1978-10-17 | Nec Corp | Auxiliary stand-by unit for time sharing communicating line |
Also Published As
Publication number | Publication date |
---|---|
JPH0150104B2 (en) | 1989-10-27 |
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