JPS57130435U - - Google Patents
Info
- Publication number
- JPS57130435U JPS57130435U JP1581881U JP1581881U JPS57130435U JP S57130435 U JPS57130435 U JP S57130435U JP 1581881 U JP1581881 U JP 1581881U JP 1581881 U JP1581881 U JP 1581881U JP S57130435 U JPS57130435 U JP S57130435U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581881U JPS57130435U (fr) | 1981-02-06 | 1981-02-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1581881U JPS57130435U (fr) | 1981-02-06 | 1981-02-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57130435U true JPS57130435U (fr) | 1982-08-14 |
Family
ID=29813808
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1581881U Pending JPS57130435U (fr) | 1981-02-06 | 1981-02-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57130435U (fr) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01199424A (ja) * | 1987-10-08 | 1989-08-10 | Tadahiro Omi | 薄膜成長方法および薄膜成長装置 |
| JP2009531549A (ja) * | 2006-03-29 | 2009-09-03 | イーストマン コダック カンパニー | 原子層堆積法 |
-
1981
- 1981-02-06 JP JP1581881U patent/JPS57130435U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01199424A (ja) * | 1987-10-08 | 1989-08-10 | Tadahiro Omi | 薄膜成長方法および薄膜成長装置 |
| JP2009531549A (ja) * | 2006-03-29 | 2009-09-03 | イーストマン コダック カンパニー | 原子層堆積法 |