JPS57130353A - Electron gun - Google Patents

Electron gun

Info

Publication number
JPS57130353A
JPS57130353A JP1547381A JP1547381A JPS57130353A JP S57130353 A JPS57130353 A JP S57130353A JP 1547381 A JP1547381 A JP 1547381A JP 1547381 A JP1547381 A JP 1547381A JP S57130353 A JPS57130353 A JP S57130353A
Authority
JP
Japan
Prior art keywords
electron gun
temperature
support cylinder
metal support
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1547381A
Other languages
Japanese (ja)
Inventor
Masaki Yamabe
Yasuo Furukawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1547381A priority Critical patent/JPS57130353A/en
Publication of JPS57130353A publication Critical patent/JPS57130353A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns

Abstract

PURPOSE:To conjecture a radiation start condition of an electron beam by providing a temperature detector on one part of an electron gun mechanism and detecting a temperature stabilized time of the electron beam mechanism through the output of the detector. CONSTITUTION:An electron gun mechanism 5, which is fixed beneath a ceramic disk 4 arranged in the lower center of a cover 1, is housed in an electron gun container 3. A cathode 6 is fixed to electrodes 8, 9 through a heater 7 made of graphite on both sides, and the electrodes 8, 9 are supported by a cylindrical ceramic supporter 10. The supporter 10 is supported by a metal support cylinder 11, and a grid 13 is fixed to the metal support cylinder 11. A thermocouple 20 is sticked on the upper surface of the metal support cylinder 11 to measure the temperature of the electron gun mechanism 5, and by detecting the time when the temperature is stabilized the electron beam is started radiation. Accordingly, a radiation start condition of the electron gun, regardless of its large heat capacity, can be rapidly conjectured.
JP1547381A 1981-02-04 1981-02-04 Electron gun Pending JPS57130353A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1547381A JPS57130353A (en) 1981-02-04 1981-02-04 Electron gun

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1547381A JPS57130353A (en) 1981-02-04 1981-02-04 Electron gun

Publications (1)

Publication Number Publication Date
JPS57130353A true JPS57130353A (en) 1982-08-12

Family

ID=11889764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1547381A Pending JPS57130353A (en) 1981-02-04 1981-02-04 Electron gun

Country Status (1)

Country Link
JP (1) JPS57130353A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007294302A (en) * 2006-04-26 2007-11-08 Shimadzu Corp Thermal electron emission type electron gun
EP2077574A1 (en) * 2006-10-23 2009-07-08 Ulvac, Inc. Method of controlling electron beam focusing of pierce type electron gun and control device therefor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007294302A (en) * 2006-04-26 2007-11-08 Shimadzu Corp Thermal electron emission type electron gun
EP2077574A1 (en) * 2006-10-23 2009-07-08 Ulvac, Inc. Method of controlling electron beam focusing of pierce type electron gun and control device therefor
EP2077574A4 (en) * 2006-10-23 2014-04-30 Ulvac Inc Method of controlling electron beam focusing of pierce type electron gun and control device therefor

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