JPS57124401A - Moisture sensor element using al anode oxide thin film - Google Patents

Moisture sensor element using al anode oxide thin film

Info

Publication number
JPS57124401A
JPS57124401A JP56008601A JP860181A JPS57124401A JP S57124401 A JPS57124401 A JP S57124401A JP 56008601 A JP56008601 A JP 56008601A JP 860181 A JP860181 A JP 860181A JP S57124401 A JPS57124401 A JP S57124401A
Authority
JP
Japan
Prior art keywords
thin film
sensor element
oxide thin
moisture sensor
anode oxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56008601A
Other languages
English (en)
Japanese (ja)
Other versions
JPS646521B2 (enrdf_load_stackoverflow
Inventor
Akira Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hokuriku Electric Industry Co Ltd
Original Assignee
Hokuriku Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hokuriku Electric Industry Co Ltd filed Critical Hokuriku Electric Industry Co Ltd
Priority to JP56008601A priority Critical patent/JPS57124401A/ja
Publication of JPS57124401A publication Critical patent/JPS57124401A/ja
Publication of JPS646521B2 publication Critical patent/JPS646521B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Non-Adjustable Resistors (AREA)
JP56008601A 1981-01-24 1981-01-24 Moisture sensor element using al anode oxide thin film Granted JPS57124401A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56008601A JPS57124401A (en) 1981-01-24 1981-01-24 Moisture sensor element using al anode oxide thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56008601A JPS57124401A (en) 1981-01-24 1981-01-24 Moisture sensor element using al anode oxide thin film

Publications (2)

Publication Number Publication Date
JPS57124401A true JPS57124401A (en) 1982-08-03
JPS646521B2 JPS646521B2 (enrdf_load_stackoverflow) 1989-02-03

Family

ID=11697480

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56008601A Granted JPS57124401A (en) 1981-01-24 1981-01-24 Moisture sensor element using al anode oxide thin film

Country Status (1)

Country Link
JP (1) JPS57124401A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58179348A (ja) * 1982-04-14 1983-10-20 Hokuriku Denki Kogyo Kk Ａｌの陽極酸化薄膜を用いた湿度センサ素子
JP2002243689A (ja) * 2001-02-15 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161247U (enrdf_load_stackoverflow) * 1979-05-04 1980-11-19

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55161247U (enrdf_load_stackoverflow) * 1979-05-04 1980-11-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58179348A (ja) * 1982-04-14 1983-10-20 Hokuriku Denki Kogyo Kk Ａｌの陽極酸化薄膜を用いた湿度センサ素子
JP2002243689A (ja) * 2001-02-15 2002-08-28 Denso Corp 容量式湿度センサおよびその製造方法

Also Published As

Publication number Publication date
JPS646521B2 (enrdf_load_stackoverflow) 1989-02-03

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