Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co LtdfiledCriticalShin-Etsu Chemical Co Ltd
Priority to JP978481ApriorityCriticalpatent/JPS57123232A/ja
Priority to DE8282100417Tprioritypatent/DE3276155D1/de
Priority to EP82100417Aprioritypatent/EP0057835B1/en
Publication of JPS57123232ApublicationCriticalpatent/JPS57123232A/ja
Publication of JPS6138935B2publicationCriticalpatent/JPS6138935B2/ja