JPS57113304A - Film thickness measuring device - Google Patents
Film thickness measuring deviceInfo
- Publication number
- JPS57113304A JPS57113304A JP18617380A JP18617380A JPS57113304A JP S57113304 A JPS57113304 A JP S57113304A JP 18617380 A JP18617380 A JP 18617380A JP 18617380 A JP18617380 A JP 18617380A JP S57113304 A JPS57113304 A JP S57113304A
- Authority
- JP
- Japan
- Prior art keywords
- film
- film thickness
- electrostatic capacity
- measurement
- motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
- G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
- G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
PURPOSE:To perform a reiable measurement of a film thickness irrespective of a temperature change, by measuring an electrostatic capacity of a capacitor at a time when two electrodes contact and part from a film. CONSTITUTION:With a rotary disc 13 turned by a motor 12, an assembly, in which a sensor retainer 9 and a toroidal guide part 10 are coupled with a bottom plate 16, can be reciprocated toward a film 1 through the medium of a transmission and a shaft 14. With the rotary disc 13 rotated by the motor 12 at a given speed, the assembly reciprocates toward the film 1 at a specified period, and as a result, the film thickness sensor 8 repeats periodical contact with and separation from the film 1. A change in an electrostatic capacity which changes periodically, can be detected in an electrostatic capacity measurement circuit 11, and this permits the realization of the reliable measurement of a film thickness under no influence of an error factor such as temperature changes.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18617380A JPS57113304A (en) | 1980-12-30 | 1980-12-30 | Film thickness measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18617380A JPS57113304A (en) | 1980-12-30 | 1980-12-30 | Film thickness measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57113304A true JPS57113304A (en) | 1982-07-14 |
Family
ID=16183661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18617380A Pending JPS57113304A (en) | 1980-12-30 | 1980-12-30 | Film thickness measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57113304A (en) |
-
1980
- 1980-12-30 JP JP18617380A patent/JPS57113304A/en active Pending
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