JPS57113186A - Pattern-position detecting system - Google Patents

Pattern-position detecting system

Info

Publication number
JPS57113186A
JPS57113186A JP55189533A JP18953380A JPS57113186A JP S57113186 A JPS57113186 A JP S57113186A JP 55189533 A JP55189533 A JP 55189533A JP 18953380 A JP18953380 A JP 18953380A JP S57113186 A JPS57113186 A JP S57113186A
Authority
JP
Japan
Prior art keywords
data
pattern
binary
circuit
picture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55189533A
Other languages
Japanese (ja)
Inventor
Tetsuo Hizuka
Masahito Nakajima
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55189533A priority Critical patent/JPS57113186A/en
Publication of JPS57113186A publication Critical patent/JPS57113186A/en
Pending legal-status Critical Current

Links

Classifications

    • A—HUMAN NECESSITIES
    • A63—SPORTS; GAMES; AMUSEMENTS
    • A63B—APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING, CLIMBING, OR FENCING; BALL GAMES; TRAINING EQUIPMENT
    • A63B7/00—Freely-suspended gymnastic apparatus
    • A63B7/02—Swinging rings; Trapezes

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physical Education & Sports Medicine (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE:To perform pattern matching by comparing data, generated from an original master pattern whose angle deviation allowable area is set, with binary- coded data of a picture obtained from a pattern to be detected. CONSTITUTION:A smaple 7, such as a semiconductor chip, is picture-taken by an ITV camera 2, and the picture data is converted by a binary-coding circuit 3 into a binary signal; and a pattern matching circuit 4 performs pattern matching between the binary-coded data and a master pattern to calculate the position of the sample 7, and on the basis of the position data, a stage 6 is moved to a proper position. The binary-coded data are sent to the shift register 41 of the circuit 4 one after another, and a comparing circuit 42 compares data, read out of the part area 4'1 of the shift register 41, with data read out of a master-pattern memory 44 to calculate the position shift of the sample 7. A target pad A and peripheral pads B and C are provided with angle allowable areas S1-S3, wherein the matching is possible even if an inclination occurs.
JP55189533A 1980-12-30 1980-12-30 Pattern-position detecting system Pending JPS57113186A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55189533A JPS57113186A (en) 1980-12-30 1980-12-30 Pattern-position detecting system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55189533A JPS57113186A (en) 1980-12-30 1980-12-30 Pattern-position detecting system

Publications (1)

Publication Number Publication Date
JPS57113186A true JPS57113186A (en) 1982-07-14

Family

ID=16242886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55189533A Pending JPS57113186A (en) 1980-12-30 1980-12-30 Pattern-position detecting system

Country Status (1)

Country Link
JP (1) JPS57113186A (en)

Similar Documents

Publication Publication Date Title
JPS5652773A (en) Image reader
JPS57153433A (en) Manufacturing device for semiconductor
ES477151A1 (en) Recognition apparatus
JPS57178486A (en) Smoothing device for binary image signal
GR3017654T3 (en) System for determining the position of an object in space using a video-optical sensor.
JPS5299720A (en) Method of converting analogous image signal to binary value
JPS54150088A (en) Test device for ic lead bend
JPS57113186A (en) Pattern-position detecting system
JPS5511343A (en) Position detecting device
JPS56155802A (en) Recognition device
FR2624601B1 (en) VIDEO-LASER DETECTION DEVICE FOR DETERMINING GEOMETRIC CHARACTERISTICS OF AN OBJECT
JPS55138603A (en) Detecting system of pattern position
JPS574134A (en) Recognizing device
JPS5720877A (en) Position detector
JPS5650475A (en) Optical character reader
JPS6423555A (en) Wiring formation and device therefor
JPS55164823A (en) Orthogonal projection image forming method of three-dimensional object
JPS56153484A (en) Preprocessing device for pattern recognition
JPS54136180A (en) Position detecting method for chip on semiconductor wafer
JPS5785180A (en) Graphic form recognizing method and its device
JPS577134A (en) Recognition apparatus
JPS6465405A (en) Pattern detecting device
JPS5541668A (en) Detecting method of character position
JPS57208441A (en) Detection system of deviation in pattern position by 2-chip comparison
JPS5635274A (en) Information extracting system