JPS57109242A - Porous thin film - Google Patents

Porous thin film

Info

Publication number
JPS57109242A
JPS57109242A JP18678480A JP18678480A JPS57109242A JP S57109242 A JPS57109242 A JP S57109242A JP 18678480 A JP18678480 A JP 18678480A JP 18678480 A JP18678480 A JP 18678480A JP S57109242 A JPS57109242 A JP S57109242A
Authority
JP
Japan
Prior art keywords
foil
gold
former
alloy
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18678480A
Other languages
Japanese (ja)
Inventor
Kenjiro Hayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP18678480A priority Critical patent/JPS57109242A/en
Publication of JPS57109242A publication Critical patent/JPS57109242A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/20Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Filtering Materials (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PURPOSE:To prevent any deterioration of the conductivity of a porous thin film by making a base metal, which is contained in an alloy consisting of a noble metal and the base metal, to be deposited, rolling the former alloy into a foil, and dissolving and removing the deposits existing in the former foil so as to make a porous thin film. CONSTITUTION:80wt% Gold and 20wt% cobalt are molten in an atmosphere of argon so as to prepare an alloy. Thus prepared alloy is subjected to solution treatment at 1,000 deg.C for 24hr, and is subjected to ageing tretament at 500 deg.C for 8hr, thereby obtaining an ingot consisting of a mother gold phase, and cobalt deposited in the former gold phase. Thus obtained ingot, by taking advantage of the spreading property of gold, is rolled into a foil of around 1mu thickness. After that, the former foil is immersed in an acid so as to dissolve and remove the cobalt deposits existing in the foil, thereby a porous gold foil film being prepared. Thus prepared gold foil film is used for a supporting base used for the observatin of rhin films. By the means mentioned above, a supporting film with full conductivity can be obtained.
JP18678480A 1980-12-26 1980-12-26 Porous thin film Pending JPS57109242A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18678480A JPS57109242A (en) 1980-12-26 1980-12-26 Porous thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18678480A JPS57109242A (en) 1980-12-26 1980-12-26 Porous thin film

Publications (1)

Publication Number Publication Date
JPS57109242A true JPS57109242A (en) 1982-07-07

Family

ID=16194530

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18678480A Pending JPS57109242A (en) 1980-12-26 1980-12-26 Porous thin film

Country Status (1)

Country Link
JP (1) JPS57109242A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4608319A (en) * 1984-09-10 1986-08-26 Dresser Industries, Inc. Extended surface area amorphous metallic material
US4977038A (en) * 1989-04-14 1990-12-11 Karl Sieradzki Micro- and nano-porous metallic structures
WO2004020064A2 (en) * 2002-08-27 2004-03-11 Johns Hopkins University Method of forming nanoporous membranes
JP2008184671A (en) * 2007-01-31 2008-08-14 Tohoku Univ Nano-porous metal and production method therefor
US7588071B2 (en) 2003-04-14 2009-09-15 Liquidmetal Technologies, Inc. Continuous casting of foamed bulk amorphous alloys
US7621314B2 (en) 2003-01-17 2009-11-24 California Institute Of Technology Method of manufacturing amorphous metallic foam
JP2010530475A (en) * 2007-06-21 2010-09-09 デンマークス テクニスク ユニヴェルジテイト−ディーティーユー Microporous layers for reducing friction in metal forming processes
WO2015022510A1 (en) * 2013-08-13 2015-02-19 Medical Research Council Electron microscopy sample support comprising porous metal foil
CN104616954A (en) * 2015-01-16 2015-05-13 北京大学 Nickel-titanium amorphous alloy grid supporting film for transmission electron microscope

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4608319A (en) * 1984-09-10 1986-08-26 Dresser Industries, Inc. Extended surface area amorphous metallic material
US4977038A (en) * 1989-04-14 1990-12-11 Karl Sieradzki Micro- and nano-porous metallic structures
WO2004020064A2 (en) * 2002-08-27 2004-03-11 Johns Hopkins University Method of forming nanoporous membranes
WO2004020064A3 (en) * 2002-08-27 2004-07-15 Univ Johns Hopkins Method of forming nanoporous membranes
US6805972B2 (en) * 2002-08-27 2004-10-19 Johns Hopkins University Method of forming nanoporous membranes
USRE45658E1 (en) 2003-01-17 2015-08-25 Crucible Intellectual Property, Llc Method of manufacturing amorphous metallic foam
US7621314B2 (en) 2003-01-17 2009-11-24 California Institute Of Technology Method of manufacturing amorphous metallic foam
US7588071B2 (en) 2003-04-14 2009-09-15 Liquidmetal Technologies, Inc. Continuous casting of foamed bulk amorphous alloys
USRE44426E1 (en) 2003-04-14 2013-08-13 Crucible Intellectual Property, Llc Continuous casting of foamed bulk amorphous alloys
JP2008184671A (en) * 2007-01-31 2008-08-14 Tohoku Univ Nano-porous metal and production method therefor
JP2010530475A (en) * 2007-06-21 2010-09-09 デンマークス テクニスク ユニヴェルジテイト−ディーティーユー Microporous layers for reducing friction in metal forming processes
WO2015022510A1 (en) * 2013-08-13 2015-02-19 Medical Research Council Electron microscopy sample support comprising porous metal foil
CN105531792A (en) * 2013-08-13 2016-04-27 医药研究委员会 Electron microscopy sample support comprising porous metal foil
US10157725B2 (en) 2013-08-13 2018-12-18 United Kingdom Research And Innovation Electron microscopy sample support including porous metal foil
AU2014307715B2 (en) * 2013-08-13 2019-02-14 United Kingdom Research And Innovation Electron microscopy sample support comprising porous metal foil
EP3522199A1 (en) * 2013-08-13 2019-08-07 United Kingdom Research and Innovation Electron microscopy sample support comprising porous metal foil
CN104616954A (en) * 2015-01-16 2015-05-13 北京大学 Nickel-titanium amorphous alloy grid supporting film for transmission electron microscope

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