JPS57109238A - Ion source device - Google Patents

Ion source device

Info

Publication number
JPS57109238A
JPS57109238A JP18590380A JP18590380A JPS57109238A JP S57109238 A JPS57109238 A JP S57109238A JP 18590380 A JP18590380 A JP 18590380A JP 18590380 A JP18590380 A JP 18590380A JP S57109238 A JPS57109238 A JP S57109238A
Authority
JP
Japan
Prior art keywords
damper
electrons
reverse
current
collide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18590380A
Other languages
Japanese (ja)
Other versions
JPS586257B2 (en
Inventor
Toru Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP18590380A priority Critical patent/JPS586257B2/en
Publication of JPS57109238A publication Critical patent/JPS57109238A/en
Publication of JPS586257B2 publication Critical patent/JPS586257B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details

Abstract

PURPOSE:To relieve load heat of an accelerating electrode, which is developed due to reflected primary electrons, which are discharged from a reverse-current damper after colliding with the former damper, by preparing the surface of the former damper, with which reverse-current electrons collide, from a metal member which discharges a small amount of reflected primary electrons. CONSTITUTION:After positive ions are electrostatically drawn out of plasmas, which are developed between a reverse-current electron damper 4 and an accelerating electrode system 7 by means of an accelerating electrode system 7, they are accelerated. At the same time, electrons are secondarily produced in the space between accelerating electrodes 7a, 7b and 7c. Part of these electrons collide with the accelerating electrode 7a. Electrons which pass through the electrode 7a without colliding with it flow in the direction opposite to that of the flow of the former positive ions, and are made to collide with the reverse- current electron damper 4. Since the damper 4 is made of a metal having a small reflected electron gain, such as aluminum, a small amount of reflected primary electrons are discharged from the damper 4 after reverse-current electrons collide with the damper 4.
JP18590380A 1980-12-26 1980-12-26 ion source device Expired JPS586257B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18590380A JPS586257B2 (en) 1980-12-26 1980-12-26 ion source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18590380A JPS586257B2 (en) 1980-12-26 1980-12-26 ion source device

Publications (2)

Publication Number Publication Date
JPS57109238A true JPS57109238A (en) 1982-07-07
JPS586257B2 JPS586257B2 (en) 1983-02-03

Family

ID=16178892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18590380A Expired JPS586257B2 (en) 1980-12-26 1980-12-26 ion source device

Country Status (1)

Country Link
JP (1) JPS586257B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037587A (en) * 1997-10-17 2000-03-14 Hewlett-Packard Company Chemical ionization source for mass spectrometry

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6037587A (en) * 1997-10-17 2000-03-14 Hewlett-Packard Company Chemical ionization source for mass spectrometry

Also Published As

Publication number Publication date
JPS586257B2 (en) 1983-02-03

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