JPS57100228U - - Google Patents
Info
- Publication number
- JPS57100228U JPS57100228U JP16035081U JP16035081U JPS57100228U JP S57100228 U JPS57100228 U JP S57100228U JP 16035081 U JP16035081 U JP 16035081U JP 16035081 U JP16035081 U JP 16035081U JP S57100228 U JPS57100228 U JP S57100228U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981160350U JPS5833702Y2 (ja) | 1981-10-29 | 1981-10-29 | 電子ビ−ム露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981160350U JPS5833702Y2 (ja) | 1981-10-29 | 1981-10-29 | 電子ビ−ム露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57100228U true JPS57100228U (forum.php) | 1982-06-19 |
| JPS5833702Y2 JPS5833702Y2 (ja) | 1983-07-28 |
Family
ID=29952762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981160350U Expired JPS5833702Y2 (ja) | 1981-10-29 | 1981-10-29 | 電子ビ−ム露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5833702Y2 (forum.php) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497700A (forum.php) * | 1972-05-26 | 1974-01-23 | ||
| JPS52103965A (en) * | 1976-02-25 | 1977-08-31 | Toshiba Corp | Electron beam projector unit |
| JPS52145774U (forum.php) * | 1976-04-27 | 1977-11-04 | ||
| JPS5334465A (en) * | 1976-09-10 | 1978-03-31 | Sharp Corp | Manufacture for semiconductor epitaxial grown layer |
-
1981
- 1981-10-29 JP JP1981160350U patent/JPS5833702Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS497700A (forum.php) * | 1972-05-26 | 1974-01-23 | ||
| JPS52103965A (en) * | 1976-02-25 | 1977-08-31 | Toshiba Corp | Electron beam projector unit |
| JPS52145774U (forum.php) * | 1976-04-27 | 1977-11-04 | ||
| JPS5334465A (en) * | 1976-09-10 | 1978-03-31 | Sharp Corp | Manufacture for semiconductor epitaxial grown layer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5833702Y2 (ja) | 1983-07-28 |