JPS5697177A - Matching type pattern inspection device using normalization method - Google Patents
Matching type pattern inspection device using normalization methodInfo
- Publication number
- JPS5697177A JPS5697177A JP17154779A JP17154779A JPS5697177A JP S5697177 A JPS5697177 A JP S5697177A JP 17154779 A JP17154779 A JP 17154779A JP 17154779 A JP17154779 A JP 17154779A JP S5697177 A JPS5697177 A JP S5697177A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- circuit
- memory
- inspected
- gravity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Image Input (AREA)
- Image Analysis (AREA)
Abstract
PURPOSE: To substantially eliminate the control for the position and shift in slope for the object to be inspected, by normalizing the center of gravity of inspected pattern and the direction of main spindle, ahead matching the pattern.
CONSTITUTION: The quantized pattern of video signal in the quantized circuit 6 is stored in the memory 19, and the center of gravity and main spindle angle are calculated at the calculation circuit 20. The normalizing circuit 19 converts the quantized pattern stored in the memory 19 into the pattern having a given center of gravity and main spindle angle based on the result of the circuit 20. Next, the output of the circuit 21 is written in respectively the normalizing standard pattern memory 22 or normalized inspected pattern memory 23 depending on the standard pattern or inspected pattern. The comparison operation circuit 24 calculates the difference between the content of memories 22 and 23. The set value comparison circuit 25 judges if this difference is within the set range, and if the result is negative, it is reported externally via the failure discrimination circuit 17.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17154779A JPS5697177A (en) | 1979-12-29 | 1979-12-29 | Matching type pattern inspection device using normalization method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17154779A JPS5697177A (en) | 1979-12-29 | 1979-12-29 | Matching type pattern inspection device using normalization method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5697177A true JPS5697177A (en) | 1981-08-05 |
JPH0135379B2 JPH0135379B2 (en) | 1989-07-25 |
Family
ID=15925140
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17154779A Granted JPS5697177A (en) | 1979-12-29 | 1979-12-29 | Matching type pattern inspection device using normalization method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5697177A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117280A (en) * | 1981-12-28 | 1983-07-12 | デイナミ−ト・ノ−ベル・アクチエンゲゼルシヤフト | Gel forming mixture comprising alkali silicate, water and gelling agent |
JPS6195480A (en) * | 1984-10-17 | 1986-05-14 | Hitachi Ltd | Alignment system between images |
JPS61251974A (en) * | 1985-04-30 | 1986-11-08 | Fanuc Ltd | Image processing device |
JPS61251973A (en) * | 1985-04-30 | 1986-11-08 | Fanuc Ltd | Image processing device |
JPS623309A (en) * | 1985-06-28 | 1987-01-09 | Omron Tateisi Electronics Co | Spindle angle detector |
JPS624588A (en) * | 1985-06-28 | 1987-01-10 | オムロン株式会社 | Centroid and main axial angle detector |
JPS62286189A (en) * | 1986-06-04 | 1987-12-12 | Omron Tateisi Electronics Co | High speed visual recognizing device |
-
1979
- 1979-12-29 JP JP17154779A patent/JPS5697177A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58117280A (en) * | 1981-12-28 | 1983-07-12 | デイナミ−ト・ノ−ベル・アクチエンゲゼルシヤフト | Gel forming mixture comprising alkali silicate, water and gelling agent |
JPH0330636B2 (en) * | 1981-12-28 | 1991-05-01 | Dynamit Nobel Ag | |
JPS6195480A (en) * | 1984-10-17 | 1986-05-14 | Hitachi Ltd | Alignment system between images |
JPS61251974A (en) * | 1985-04-30 | 1986-11-08 | Fanuc Ltd | Image processing device |
JPS61251973A (en) * | 1985-04-30 | 1986-11-08 | Fanuc Ltd | Image processing device |
JPS623309A (en) * | 1985-06-28 | 1987-01-09 | Omron Tateisi Electronics Co | Spindle angle detector |
JPS624588A (en) * | 1985-06-28 | 1987-01-10 | オムロン株式会社 | Centroid and main axial angle detector |
JPS62286189A (en) * | 1986-06-04 | 1987-12-12 | Omron Tateisi Electronics Co | High speed visual recognizing device |
Also Published As
Publication number | Publication date |
---|---|
JPH0135379B2 (en) | 1989-07-25 |
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