JPS5697177A - Matching type pattern inspection device using normalization method - Google Patents

Matching type pattern inspection device using normalization method

Info

Publication number
JPS5697177A
JPS5697177A JP17154779A JP17154779A JPS5697177A JP S5697177 A JPS5697177 A JP S5697177A JP 17154779 A JP17154779 A JP 17154779A JP 17154779 A JP17154779 A JP 17154779A JP S5697177 A JPS5697177 A JP S5697177A
Authority
JP
Japan
Prior art keywords
pattern
circuit
memory
inspected
gravity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17154779A
Other languages
Japanese (ja)
Other versions
JPH0135379B2 (en
Inventor
Yasuo Hongo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP17154779A priority Critical patent/JPS5697177A/en
Publication of JPS5697177A publication Critical patent/JPS5697177A/en
Publication of JPH0135379B2 publication Critical patent/JPH0135379B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Input (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE: To substantially eliminate the control for the position and shift in slope for the object to be inspected, by normalizing the center of gravity of inspected pattern and the direction of main spindle, ahead matching the pattern.
CONSTITUTION: The quantized pattern of video signal in the quantized circuit 6 is stored in the memory 19, and the center of gravity and main spindle angle are calculated at the calculation circuit 20. The normalizing circuit 19 converts the quantized pattern stored in the memory 19 into the pattern having a given center of gravity and main spindle angle based on the result of the circuit 20. Next, the output of the circuit 21 is written in respectively the normalizing standard pattern memory 22 or normalized inspected pattern memory 23 depending on the standard pattern or inspected pattern. The comparison operation circuit 24 calculates the difference between the content of memories 22 and 23. The set value comparison circuit 25 judges if this difference is within the set range, and if the result is negative, it is reported externally via the failure discrimination circuit 17.
COPYRIGHT: (C)1981,JPO&Japio
JP17154779A 1979-12-29 1979-12-29 Matching type pattern inspection device using normalization method Granted JPS5697177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17154779A JPS5697177A (en) 1979-12-29 1979-12-29 Matching type pattern inspection device using normalization method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17154779A JPS5697177A (en) 1979-12-29 1979-12-29 Matching type pattern inspection device using normalization method

Publications (2)

Publication Number Publication Date
JPS5697177A true JPS5697177A (en) 1981-08-05
JPH0135379B2 JPH0135379B2 (en) 1989-07-25

Family

ID=15925140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17154779A Granted JPS5697177A (en) 1979-12-29 1979-12-29 Matching type pattern inspection device using normalization method

Country Status (1)

Country Link
JP (1) JPS5697177A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117280A (en) * 1981-12-28 1983-07-12 デイナミ−ト・ノ−ベル・アクチエンゲゼルシヤフト Gel forming mixture comprising alkali silicate, water and gelling agent
JPS6195480A (en) * 1984-10-17 1986-05-14 Hitachi Ltd Alignment system between images
JPS61251974A (en) * 1985-04-30 1986-11-08 Fanuc Ltd Image processing device
JPS61251973A (en) * 1985-04-30 1986-11-08 Fanuc Ltd Image processing device
JPS623309A (en) * 1985-06-28 1987-01-09 Omron Tateisi Electronics Co Spindle angle detector
JPS624588A (en) * 1985-06-28 1987-01-10 オムロン株式会社 Centroid and main axial angle detector
JPS62286189A (en) * 1986-06-04 1987-12-12 Omron Tateisi Electronics Co High speed visual recognizing device

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58117280A (en) * 1981-12-28 1983-07-12 デイナミ−ト・ノ−ベル・アクチエンゲゼルシヤフト Gel forming mixture comprising alkali silicate, water and gelling agent
JPH0330636B2 (en) * 1981-12-28 1991-05-01 Dynamit Nobel Ag
JPS6195480A (en) * 1984-10-17 1986-05-14 Hitachi Ltd Alignment system between images
JPS61251974A (en) * 1985-04-30 1986-11-08 Fanuc Ltd Image processing device
JPS61251973A (en) * 1985-04-30 1986-11-08 Fanuc Ltd Image processing device
JPS623309A (en) * 1985-06-28 1987-01-09 Omron Tateisi Electronics Co Spindle angle detector
JPS624588A (en) * 1985-06-28 1987-01-10 オムロン株式会社 Centroid and main axial angle detector
JPS62286189A (en) * 1986-06-04 1987-12-12 Omron Tateisi Electronics Co High speed visual recognizing device

Also Published As

Publication number Publication date
JPH0135379B2 (en) 1989-07-25

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