JPS568188Y2 - - Google Patents
Info
- Publication number
- JPS568188Y2 JPS568188Y2 JP5217176U JP5217176U JPS568188Y2 JP S568188 Y2 JPS568188 Y2 JP S568188Y2 JP 5217176 U JP5217176 U JP 5217176U JP 5217176 U JP5217176 U JP 5217176U JP S568188 Y2 JPS568188 Y2 JP S568188Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5217176U JPS568188Y2 (forum.php) | 1976-04-27 | 1976-04-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5217176U JPS568188Y2 (forum.php) | 1976-04-27 | 1976-04-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52145774U JPS52145774U (forum.php) | 1977-11-04 |
| JPS568188Y2 true JPS568188Y2 (forum.php) | 1981-02-23 |
Family
ID=28511253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5217176U Expired JPS568188Y2 (forum.php) | 1976-04-27 | 1976-04-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS568188Y2 (forum.php) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5654037A (en) * | 1979-10-08 | 1981-05-13 | Jeol Ltd | Sample holder in electron ray exposure device, etc. |
| JPS5833702Y2 (ja) * | 1981-10-29 | 1983-07-28 | 日本電信電話株式会社 | 電子ビ−ム露光装置 |
| JPH0620037B2 (ja) * | 1982-12-28 | 1994-03-16 | 株式会社東芝 | 試料搬送装置 |
-
1976
- 1976-04-27 JP JP5217176U patent/JPS568188Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52145774U (forum.php) | 1977-11-04 |