JPS568186Y2 - - Google Patents

Info

Publication number
JPS568186Y2
JPS568186Y2 JP4956476U JP4956476U JPS568186Y2 JP S568186 Y2 JPS568186 Y2 JP S568186Y2 JP 4956476 U JP4956476 U JP 4956476U JP 4956476 U JP4956476 U JP 4956476U JP S568186 Y2 JPS568186 Y2 JP S568186Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4956476U
Other languages
Japanese (ja)
Other versions
JPS52140766U (ro
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4956476U priority Critical patent/JPS568186Y2/ja
Publication of JPS52140766U publication Critical patent/JPS52140766U/ja
Application granted granted Critical
Publication of JPS568186Y2 publication Critical patent/JPS568186Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP4956476U 1976-04-20 1976-04-20 Expired JPS568186Y2 (ro)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4956476U JPS568186Y2 (ro) 1976-04-20 1976-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4956476U JPS568186Y2 (ro) 1976-04-20 1976-04-20

Publications (2)

Publication Number Publication Date
JPS52140766U JPS52140766U (ro) 1977-10-25
JPS568186Y2 true JPS568186Y2 (ro) 1981-02-23

Family

ID=28508745

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4956476U Expired JPS568186Y2 (ro) 1976-04-20 1976-04-20

Country Status (1)

Country Link
JP (1) JPS568186Y2 (ro)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175B2 (ja) * 1980-03-27 1983-01-05 富士通株式会社 分子線源用セル
JPS5730321A (en) * 1980-07-29 1982-02-18 Fujitsu Ltd Molecular beam source for molecular beam epitaxy

Also Published As

Publication number Publication date
JPS52140766U (ro) 1977-10-25

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