JPS568186Y2 - - Google Patents
Info
- Publication number
- JPS568186Y2 JPS568186Y2 JP4956476U JP4956476U JPS568186Y2 JP S568186 Y2 JPS568186 Y2 JP S568186Y2 JP 4956476 U JP4956476 U JP 4956476U JP 4956476 U JP4956476 U JP 4956476U JP S568186 Y2 JPS568186 Y2 JP S568186Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4956476U JPS568186Y2 (en:Method) | 1976-04-20 | 1976-04-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4956476U JPS568186Y2 (en:Method) | 1976-04-20 | 1976-04-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52140766U JPS52140766U (en:Method) | 1977-10-25 |
| JPS568186Y2 true JPS568186Y2 (en:Method) | 1981-02-23 |
Family
ID=28508745
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4956476U Expired JPS568186Y2 (en:Method) | 1976-04-20 | 1976-04-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS568186Y2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58175B2 (ja) * | 1980-03-27 | 1983-01-05 | 富士通株式会社 | 分子線源用セル |
| JPS5730321A (en) * | 1980-07-29 | 1982-02-18 | Fujitsu Ltd | Molecular beam source for molecular beam epitaxy |
-
1976
- 1976-04-20 JP JP4956476U patent/JPS568186Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52140766U (en:Method) | 1977-10-25 |