JPS5681408A - Measuring method by laser beam - Google Patents

Measuring method by laser beam

Info

Publication number
JPS5681408A
JPS5681408A JP15860279A JP15860279A JPS5681408A JP S5681408 A JPS5681408 A JP S5681408A JP 15860279 A JP15860279 A JP 15860279A JP 15860279 A JP15860279 A JP 15860279A JP S5681408 A JPS5681408 A JP S5681408A
Authority
JP
Japan
Prior art keywords
fall
mirrors
displacement
beams
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15860279A
Other languages
English (en)
Inventor
Minoru Fujino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15860279A priority Critical patent/JPS5681408A/ja
Publication of JPS5681408A publication Critical patent/JPS5681408A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP15860279A 1979-12-06 1979-12-06 Measuring method by laser beam Pending JPS5681408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15860279A JPS5681408A (en) 1979-12-06 1979-12-06 Measuring method by laser beam

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15860279A JPS5681408A (en) 1979-12-06 1979-12-06 Measuring method by laser beam

Publications (1)

Publication Number Publication Date
JPS5681408A true JPS5681408A (en) 1981-07-03

Family

ID=15675276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15860279A Pending JPS5681408A (en) 1979-12-06 1979-12-06 Measuring method by laser beam

Country Status (1)

Country Link
JP (1) JPS5681408A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03269311A (ja) * 1990-03-20 1991-11-29 Copal Electron Co Ltd 光ビーム位置検出装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03269311A (ja) * 1990-03-20 1991-11-29 Copal Electron Co Ltd 光ビーム位置検出装置

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