JPS5679487A - Amplefier for elastic surface wave - Google Patents
Amplefier for elastic surface waveInfo
- Publication number
- JPS5679487A JPS5679487A JP15699379A JP15699379A JPS5679487A JP S5679487 A JPS5679487 A JP S5679487A JP 15699379 A JP15699379 A JP 15699379A JP 15699379 A JP15699379 A JP 15699379A JP S5679487 A JPS5679487 A JP S5679487A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- electrode
- saw
- piled
- piezoelectric body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/36—Devices for manipulating acoustic surface waves
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To intend the miniaturization of an element and a noize decrease by piling and arranging an occurring portion of an elastic surface wave SAW and an amplification portion upon an laminating layer direction of a piezoelectric body layer and a semiconductor layer. CONSTITUTION:A ZnO piezoelectric body 11 is piled upon a P-type Si 14 through a SiO2 film 13 and a comb-type electrode 12 is attached thereto. A couple of N<+> layers for direct current electrode are embed towards a propagation direction A on the surface of the Si 14. After an AC and a DC are connected to the electrode 12, the Si 14 is earthed. A depletion layer 18 and a inversion layer 19 are caused on the surface of Si 14 by DC power source. When the AC is applied, the SAW occurs on layer 11. On the other hand, when the voltage is applied toward the A direction of the AC electrode 15, free electric charges in layer 19 increase the amplitude of SAW. At this time, the SAW of the reverse direction against A is damped by the DC electric field of the electrode 15. Further, since the electrode 12, and 15a and 15b are piled up in the laminated direction, the device is miniaturized without extending horizontally.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15699379A JPS5679487A (en) | 1979-12-04 | 1979-12-04 | Amplefier for elastic surface wave |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15699379A JPS5679487A (en) | 1979-12-04 | 1979-12-04 | Amplefier for elastic surface wave |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5679487A true JPS5679487A (en) | 1981-06-30 |
Family
ID=15639823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15699379A Pending JPS5679487A (en) | 1979-12-04 | 1979-12-04 | Amplefier for elastic surface wave |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5679487A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63206017A (en) * | 1987-02-23 | 1988-08-25 | Hitachi Ltd | Surface acoustic wave device |
JPH0575345A (en) * | 1991-09-12 | 1993-03-26 | Matsushita Electric Ind Co Ltd | Microwave integrated circuit and its manufacture |
JPH0629741A (en) * | 1992-03-04 | 1994-02-04 | Matsushita Electric Ind Co Ltd | Hybrid integrated circuit and its production |
JPH06120416A (en) * | 1992-10-05 | 1994-04-28 | Matsushita Electric Ind Co Ltd | Acoustoelectronic integrated circuit and manufacture thereof |
JPH06125038A (en) * | 1992-10-13 | 1994-05-06 | Matsushita Electric Ind Co Ltd | Electroacoustic integrated circuit and its manufacture |
JPH06125036A (en) * | 1992-10-13 | 1994-05-06 | Matsushita Electric Ind Co Ltd | Electroacoustic integrated circuit and its manufacture |
JPH06283927A (en) * | 1992-02-10 | 1994-10-07 | Matsushita Electric Ind Co Ltd | Hybrid integrated circuit and its production |
-
1979
- 1979-12-04 JP JP15699379A patent/JPS5679487A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63206017A (en) * | 1987-02-23 | 1988-08-25 | Hitachi Ltd | Surface acoustic wave device |
JPH0575345A (en) * | 1991-09-12 | 1993-03-26 | Matsushita Electric Ind Co Ltd | Microwave integrated circuit and its manufacture |
JPH06283927A (en) * | 1992-02-10 | 1994-10-07 | Matsushita Electric Ind Co Ltd | Hybrid integrated circuit and its production |
JPH0629741A (en) * | 1992-03-04 | 1994-02-04 | Matsushita Electric Ind Co Ltd | Hybrid integrated circuit and its production |
JPH06120416A (en) * | 1992-10-05 | 1994-04-28 | Matsushita Electric Ind Co Ltd | Acoustoelectronic integrated circuit and manufacture thereof |
JPH06125038A (en) * | 1992-10-13 | 1994-05-06 | Matsushita Electric Ind Co Ltd | Electroacoustic integrated circuit and its manufacture |
JPH06125036A (en) * | 1992-10-13 | 1994-05-06 | Matsushita Electric Ind Co Ltd | Electroacoustic integrated circuit and its manufacture |
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