JPS567293B2 - - Google Patents

Info

Publication number
JPS567293B2
JPS567293B2 JP1296377A JP1296377A JPS567293B2 JP S567293 B2 JPS567293 B2 JP S567293B2 JP 1296377 A JP1296377 A JP 1296377A JP 1296377 A JP1296377 A JP 1296377A JP S567293 B2 JPS567293 B2 JP S567293B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1296377A
Other languages
Japanese (ja)
Other versions
JPS5398779A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1296377A priority Critical patent/JPS5398779A/ja
Publication of JPS5398779A publication Critical patent/JPS5398779A/ja
Publication of JPS567293B2 publication Critical patent/JPS567293B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP1296377A 1977-02-10 1977-02-10 Manufacture for silicon oxide film Granted JPS5398779A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1296377A JPS5398779A (en) 1977-02-10 1977-02-10 Manufacture for silicon oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1296377A JPS5398779A (en) 1977-02-10 1977-02-10 Manufacture for silicon oxide film

Publications (2)

Publication Number Publication Date
JPS5398779A JPS5398779A (en) 1978-08-29
JPS567293B2 true JPS567293B2 (cs) 1981-02-17

Family

ID=11819899

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1296377A Granted JPS5398779A (en) 1977-02-10 1977-02-10 Manufacture for silicon oxide film

Country Status (1)

Country Link
JP (1) JPS5398779A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126384U (cs) * 1989-03-29 1990-10-18

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5987821A (ja) * 1982-11-11 1984-05-21 Seiko Epson Corp 酸化法
JPH0691077B2 (ja) * 1985-03-26 1994-11-14 株式会社東芝 半導体装置の製造方法
JP3814841B2 (ja) * 1995-07-06 2006-08-30 住友化学株式会社 金属酸化物粉末の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126384U (cs) * 1989-03-29 1990-10-18

Also Published As

Publication number Publication date
JPS5398779A (en) 1978-08-29

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