JPS5671518A - Production of thin film - Google Patents
Production of thin filmInfo
- Publication number
- JPS5671518A JPS5671518A JP14810179A JP14810179A JPS5671518A JP S5671518 A JPS5671518 A JP S5671518A JP 14810179 A JP14810179 A JP 14810179A JP 14810179 A JP14810179 A JP 14810179A JP S5671518 A JPS5671518 A JP S5671518A
- Authority
- JP
- Japan
- Prior art keywords
- substrates
- metals
- alloys
- cathode
- sputtering device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14810179A JPS5671518A (en) | 1979-11-15 | 1979-11-15 | Production of thin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14810179A JPS5671518A (en) | 1979-11-15 | 1979-11-15 | Production of thin film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5671518A true JPS5671518A (en) | 1981-06-15 |
Family
ID=15445259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14810179A Pending JPS5671518A (en) | 1979-11-15 | 1979-11-15 | Production of thin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5671518A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58199619A (ja) * | 1982-05-17 | 1983-11-21 | Teijin Ltd | 金属薄膜の製造法 |
JPS62136829A (ja) * | 1985-12-10 | 1987-06-19 | Sharp Corp | 光半導体素子のダイボンド方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5150230A (en) * | 1974-10-28 | 1976-05-01 | Reiko Kk | Kinzokuhakumakuno seizohoho |
JPS53131929A (en) * | 1977-04-22 | 1978-11-17 | Oike Kogyo Kk | Preparation of beryllium metallic foil |
-
1979
- 1979-11-15 JP JP14810179A patent/JPS5671518A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5150230A (en) * | 1974-10-28 | 1976-05-01 | Reiko Kk | Kinzokuhakumakuno seizohoho |
JPS53131929A (en) * | 1977-04-22 | 1978-11-17 | Oike Kogyo Kk | Preparation of beryllium metallic foil |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58199619A (ja) * | 1982-05-17 | 1983-11-21 | Teijin Ltd | 金属薄膜の製造法 |
JPS62136829A (ja) * | 1985-12-10 | 1987-06-19 | Sharp Corp | 光半導体素子のダイボンド方法 |
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