JPS5671518A - Production of thin film - Google Patents

Production of thin film

Info

Publication number
JPS5671518A
JPS5671518A JP14810179A JP14810179A JPS5671518A JP S5671518 A JPS5671518 A JP S5671518A JP 14810179 A JP14810179 A JP 14810179A JP 14810179 A JP14810179 A JP 14810179A JP S5671518 A JPS5671518 A JP S5671518A
Authority
JP
Japan
Prior art keywords
substrates
metals
alloys
cathode
sputtering device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14810179A
Other languages
English (en)
Inventor
Masami Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP14810179A priority Critical patent/JPS5671518A/ja
Publication of JPS5671518A publication Critical patent/JPS5671518A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP14810179A 1979-11-15 1979-11-15 Production of thin film Pending JPS5671518A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14810179A JPS5671518A (en) 1979-11-15 1979-11-15 Production of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14810179A JPS5671518A (en) 1979-11-15 1979-11-15 Production of thin film

Publications (1)

Publication Number Publication Date
JPS5671518A true JPS5671518A (en) 1981-06-15

Family

ID=15445259

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14810179A Pending JPS5671518A (en) 1979-11-15 1979-11-15 Production of thin film

Country Status (1)

Country Link
JP (1) JPS5671518A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199619A (ja) * 1982-05-17 1983-11-21 Teijin Ltd 金属薄膜の製造法
JPS62136829A (ja) * 1985-12-10 1987-06-19 Sharp Corp 光半導体素子のダイボンド方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5150230A (en) * 1974-10-28 1976-05-01 Reiko Kk Kinzokuhakumakuno seizohoho
JPS53131929A (en) * 1977-04-22 1978-11-17 Oike Kogyo Kk Preparation of beryllium metallic foil

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5150230A (en) * 1974-10-28 1976-05-01 Reiko Kk Kinzokuhakumakuno seizohoho
JPS53131929A (en) * 1977-04-22 1978-11-17 Oike Kogyo Kk Preparation of beryllium metallic foil

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199619A (ja) * 1982-05-17 1983-11-21 Teijin Ltd 金属薄膜の製造法
JPS62136829A (ja) * 1985-12-10 1987-06-19 Sharp Corp 光半導体素子のダイボンド方法

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