JPS567107A - Fine adjusting mechanism for height and inclination angle of stage - Google Patents
Fine adjusting mechanism for height and inclination angle of stageInfo
- Publication number
- JPS567107A JPS567107A JP8243879A JP8243879A JPS567107A JP S567107 A JPS567107 A JP S567107A JP 8243879 A JP8243879 A JP 8243879A JP 8243879 A JP8243879 A JP 8243879A JP S567107 A JPS567107 A JP S567107A
- Authority
- JP
- Japan
- Prior art keywords
- stage
- height
- inclination angle
- adjustment
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Abstract
PURPOSE: To ensure the fine adjustment for the height and the inclination of the stage by moving up and down the stage at three points by the up-down fine movement mechanism which uses a miniature motor for the driving source, thus realizing a light-weight and compact mechanism as well as the cost reduction by eliminating the heat generation.
CONSTITUTION: Stage 10 is connected at three points to up-down fine movement mechanism 11 by coupling component 12, and three units of mechanism 11 are fixed to substrate 13. The fine adjustment is possible for the height of stage 10 by moving three units of mechanism 11 at one time; and the inclination angle of stage 10 can be adjusted by moving up and down these three units individually. For adjustment of the inclination angle, stage 10 is tilted around virtual axes 14 and 15 which are orthogonal to substrate 13 and mechanism 11, and then the adjustment must be given to the slope having the degree of freedom of 2. In this connection, component 12 must have the sufficient rigidity of move stage 10 up and down, i.e. longitudinally along with a small rigidity in the horizontal, i.e. lateral direction, thus having to substitute the pivot having the degree of freedom of 2.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8243879A JPS583241B2 (en) | 1979-06-29 | 1979-06-29 | Stage height and tilt angle fine adjustment mechanism |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8243879A JPS583241B2 (en) | 1979-06-29 | 1979-06-29 | Stage height and tilt angle fine adjustment mechanism |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS567107A true JPS567107A (en) | 1981-01-24 |
JPS583241B2 JPS583241B2 (en) | 1983-01-20 |
Family
ID=13774543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8243879A Expired JPS583241B2 (en) | 1979-06-29 | 1979-06-29 | Stage height and tilt angle fine adjustment mechanism |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS583241B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0389876A (en) * | 1989-08-31 | 1991-04-15 | Sumitomo Heavy Ind Ltd | Piezoelectric actuator and stage device using the same |
-
1979
- 1979-06-29 JP JP8243879A patent/JPS583241B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0389876A (en) * | 1989-08-31 | 1991-04-15 | Sumitomo Heavy Ind Ltd | Piezoelectric actuator and stage device using the same |
Also Published As
Publication number | Publication date |
---|---|
JPS583241B2 (en) | 1983-01-20 |
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