JPS567107A - Fine adjusting mechanism for height and inclination angle of stage - Google Patents

Fine adjusting mechanism for height and inclination angle of stage

Info

Publication number
JPS567107A
JPS567107A JP8243879A JP8243879A JPS567107A JP S567107 A JPS567107 A JP S567107A JP 8243879 A JP8243879 A JP 8243879A JP 8243879 A JP8243879 A JP 8243879A JP S567107 A JPS567107 A JP S567107A
Authority
JP
Japan
Prior art keywords
stage
height
inclination angle
adjustment
moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8243879A
Other languages
Japanese (ja)
Other versions
JPS583241B2 (en
Inventor
Toshiyuki Horiuchi
Kazue Yoshida
Hiromitsu Iwata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Nippon Chemical Industrial Co Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Chemical Industrial Co Ltd
Nippon Telegraph and Telephone Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Chemical Industrial Co Ltd, Nippon Telegraph and Telephone Corp, Nippon Kogaku KK filed Critical Nippon Chemical Industrial Co Ltd
Priority to JP8243879A priority Critical patent/JPS583241B2/en
Publication of JPS567107A publication Critical patent/JPS567107A/en
Publication of JPS583241B2 publication Critical patent/JPS583241B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE: To ensure the fine adjustment for the height and the inclination of the stage by moving up and down the stage at three points by the up-down fine movement mechanism which uses a miniature motor for the driving source, thus realizing a light-weight and compact mechanism as well as the cost reduction by eliminating the heat generation.
CONSTITUTION: Stage 10 is connected at three points to up-down fine movement mechanism 11 by coupling component 12, and three units of mechanism 11 are fixed to substrate 13. The fine adjustment is possible for the height of stage 10 by moving three units of mechanism 11 at one time; and the inclination angle of stage 10 can be adjusted by moving up and down these three units individually. For adjustment of the inclination angle, stage 10 is tilted around virtual axes 14 and 15 which are orthogonal to substrate 13 and mechanism 11, and then the adjustment must be given to the slope having the degree of freedom of 2. In this connection, component 12 must have the sufficient rigidity of move stage 10 up and down, i.e. longitudinally along with a small rigidity in the horizontal, i.e. lateral direction, thus having to substitute the pivot having the degree of freedom of 2.
COPYRIGHT: (C)1981,JPO&Japio
JP8243879A 1979-06-29 1979-06-29 Stage height and tilt angle fine adjustment mechanism Expired JPS583241B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8243879A JPS583241B2 (en) 1979-06-29 1979-06-29 Stage height and tilt angle fine adjustment mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8243879A JPS583241B2 (en) 1979-06-29 1979-06-29 Stage height and tilt angle fine adjustment mechanism

Publications (2)

Publication Number Publication Date
JPS567107A true JPS567107A (en) 1981-01-24
JPS583241B2 JPS583241B2 (en) 1983-01-20

Family

ID=13774543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8243879A Expired JPS583241B2 (en) 1979-06-29 1979-06-29 Stage height and tilt angle fine adjustment mechanism

Country Status (1)

Country Link
JP (1) JPS583241B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0389876A (en) * 1989-08-31 1991-04-15 Sumitomo Heavy Ind Ltd Piezoelectric actuator and stage device using the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0389876A (en) * 1989-08-31 1991-04-15 Sumitomo Heavy Ind Ltd Piezoelectric actuator and stage device using the same

Also Published As

Publication number Publication date
JPS583241B2 (en) 1983-01-20

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