JPS566531B2 - - Google Patents
Info
- Publication number
- JPS566531B2 JPS566531B2 JP162476A JP162476A JPS566531B2 JP S566531 B2 JPS566531 B2 JP S566531B2 JP 162476 A JP162476 A JP 162476A JP 162476 A JP162476 A JP 162476A JP S566531 B2 JPS566531 B2 JP S566531B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Polymerisation Methods In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP162476A JPS5285475A (en) | 1976-01-09 | 1976-01-09 | Formation method of high molecular film patterns by high energy beams |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP162476A JPS5285475A (en) | 1976-01-09 | 1976-01-09 | Formation method of high molecular film patterns by high energy beams |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5285475A JPS5285475A (en) | 1977-07-15 |
| JPS566531B2 true JPS566531B2 (OSRAM) | 1981-02-12 |
Family
ID=11506675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP162476A Granted JPS5285475A (en) | 1976-01-09 | 1976-01-09 | Formation method of high molecular film patterns by high energy beams |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5285475A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60102238A (ja) * | 1983-11-08 | 1985-06-06 | Aida Eng Ltd | フロ−タベ−スの走行装置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IL42266A0 (en) * | 1972-10-16 | 1973-07-30 | American Can Co | Copolymer of glycidyl methacrylate and allyl glycidyl ether |
| FR2234986A1 (en) * | 1973-06-27 | 1975-01-24 | Ibm | Negative resist materials from oxygen-contg. vinyl polymers - for making printed circuit masks with high definition |
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1976
- 1976-01-09 JP JP162476A patent/JPS5285475A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60102238A (ja) * | 1983-11-08 | 1985-06-06 | Aida Eng Ltd | フロ−タベ−スの走行装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5285475A (en) | 1977-07-15 |