JPS5661603A - Dimension measuring device - Google Patents

Dimension measuring device

Info

Publication number
JPS5661603A
JPS5661603A JP13724879A JP13724879A JPS5661603A JP S5661603 A JPS5661603 A JP S5661603A JP 13724879 A JP13724879 A JP 13724879A JP 13724879 A JP13724879 A JP 13724879A JP S5661603 A JPS5661603 A JP S5661603A
Authority
JP
Japan
Prior art keywords
sample
electron beams
deflecting
deflected
objective lens
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13724879A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6327641B2 (enrdf_load_stackoverflow
Inventor
Mamoru Nakasuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP13724879A priority Critical patent/JPS5661603A/ja
Publication of JPS5661603A publication Critical patent/JPS5661603A/ja
Publication of JPS6327641B2 publication Critical patent/JPS6327641B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
JP13724879A 1979-10-24 1979-10-24 Dimension measuring device Granted JPS5661603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13724879A JPS5661603A (en) 1979-10-24 1979-10-24 Dimension measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13724879A JPS5661603A (en) 1979-10-24 1979-10-24 Dimension measuring device

Publications (2)

Publication Number Publication Date
JPS5661603A true JPS5661603A (en) 1981-05-27
JPS6327641B2 JPS6327641B2 (enrdf_load_stackoverflow) 1988-06-03

Family

ID=15194223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13724879A Granted JPS5661603A (en) 1979-10-24 1979-10-24 Dimension measuring device

Country Status (1)

Country Link
JP (1) JPS5661603A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012108324A (ja) * 2010-11-17 2012-06-07 Ricoh Co Ltd 表面電荷分布測定方法および表面電荷分布測定装置
JP2017022115A (ja) * 2015-07-14 2017-01-26 アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー 荷電粒子ビーム装置内でコマおよび色収差を低減させる方法ならびに荷電粒子ビーム装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424262A (en) * 1977-07-26 1979-02-23 Minoru Nakamura Method of making metal granules

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5424262A (en) * 1977-07-26 1979-02-23 Minoru Nakamura Method of making metal granules

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012108324A (ja) * 2010-11-17 2012-06-07 Ricoh Co Ltd 表面電荷分布測定方法および表面電荷分布測定装置
JP2017022115A (ja) * 2015-07-14 2017-01-26 アイシーティー インテグレーテッド サーキット テスティング ゲゼルシャフト フィーア ハルプライタープリーフテヒニック エム ベー ハー 荷電粒子ビーム装置内でコマおよび色収差を低減させる方法ならびに荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPS6327641B2 (enrdf_load_stackoverflow) 1988-06-03

Similar Documents

Publication Publication Date Title
US4658138A (en) Scanning electron microscope
US3222979A (en) Non-contacting dimensional gaging of objects with an electron-optics device
US4670652A (en) Charged particle beam microprobe apparatus
US3714424A (en) Apparatus for improving the signal information in the examination of samples by scanning electron microscopy or electron probe microanalysis
GB1145657A (en) A method and apparatus for detecting the concentration of particles in a gaseous atmosphere
JPS5661603A (en) Dimension measuring device
US4233510A (en) Scanning electron microscope
US3161725A (en) Optical displacement follower
Bond et al. A wide aperture high gain beam profile scanner
DE2730889A1 (de) Einrichtung zur ortsaufloesenden materialuntersuchung einer probe
Skaggs A Precise Determination of the Energy Released in the Production of Deuterium from Beryllium under Proton Bombardment
SU951150A1 (ru) Высоковольтный импульсный электронно-лучевой осциллограф
JPS54105972A (en) Electron beam exposure device
JPS5543821A (en) Electronic drawing device
JPS6233246Y2 (enrdf_load_stackoverflow)
DENIAK et al. An accelerated electron beam position and shape meter
JPS54138467A (en) Scanning type electron microscope or resembling apparatus
SU143600A1 (ru) Способ измерени скорости движени непрозрачных тел
JPS5636058A (en) Measuring system for surface electric potential
JPS55128240A (en) Image display unit of corpuscular ray device
SU1472940A1 (ru) Способ исследовани движени электронов в электрических и магнитных пол х
GB1569299A (en) For use in the method method of producing a scanning electron microscope image having reduced distortion and scanning electron microscopes
Ditta et al. Test of a position sensitive photomultiplier hodoscope
SU527590A1 (ru) Автоколлиматор
JPS54107677A (en) Rotation error detection method of apperture in electronic ray exposure and its unit