JPS5661126A - Table for fixing substrate - Google Patents
Table for fixing substrateInfo
- Publication number
- JPS5661126A JPS5661126A JP13724779A JP13724779A JPS5661126A JP S5661126 A JPS5661126 A JP S5661126A JP 13724779 A JP13724779 A JP 13724779A JP 13724779 A JP13724779 A JP 13724779A JP S5661126 A JPS5661126 A JP S5661126A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- fixing table
- constitution
- electrodes
- static electricity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title abstract 6
- 230000005611 electricity Effects 0.000 abstract 2
- 230000003068 static effect Effects 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 1
- 229920006267 polyester film Polymers 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To tightly contact a substrate to a dielectric film provided on a substrate fixing table by static electricity caused by friction. CONSTITUTION:A high frequency power source 3 is connected between electrodes 1 and 2. The electrodes 2 also serves as the substrate fixing table, and is cooled by water. A polyester film 5 is contacted on the electrode 2. The static electricity is generated by rubbing the film 5 with a piece of gauze, thereby the Si substrate 6 is electrostatically contacted tightly. In this constitution, the substrate 6 can be fixed to the fixing table without expensive auxiliary devices, and the etching can be uniformly performed under the sufficiently cooled state.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13724779A JPS5661126A (en) | 1979-10-24 | 1979-10-24 | Table for fixing substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13724779A JPS5661126A (en) | 1979-10-24 | 1979-10-24 | Table for fixing substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5661126A true JPS5661126A (en) | 1981-05-26 |
Family
ID=15194201
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13724779A Pending JPS5661126A (en) | 1979-10-24 | 1979-10-24 | Table for fixing substrate |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5661126A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6687969B1 (en) * | 1997-05-16 | 2004-02-10 | Micron Technology, Inc. | Methods of fixturing flexible substrates and methods of processing flexible substrates |
-
1979
- 1979-10-24 JP JP13724779A patent/JPS5661126A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6687969B1 (en) * | 1997-05-16 | 2004-02-10 | Micron Technology, Inc. | Methods of fixturing flexible substrates and methods of processing flexible substrates |
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