JPS5660677A - Ultrasonic washer - Google Patents
Ultrasonic washerInfo
- Publication number
- JPS5660677A JPS5660677A JP13718879A JP13718879A JPS5660677A JP S5660677 A JPS5660677 A JP S5660677A JP 13718879 A JP13718879 A JP 13718879A JP 13718879 A JP13718879 A JP 13718879A JP S5660677 A JPS5660677 A JP S5660677A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic washer
- washer
- ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13718879A JPS5660677A (en) | 1979-10-23 | 1979-10-23 | Ultrasonic washer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13718879A JPS5660677A (en) | 1979-10-23 | 1979-10-23 | Ultrasonic washer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5660677A true JPS5660677A (en) | 1981-05-25 |
Family
ID=15192849
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13718879A Pending JPS5660677A (en) | 1979-10-23 | 1979-10-23 | Ultrasonic washer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5660677A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02257632A (en) * | 1989-03-30 | 1990-10-18 | Toshiba Corp | Method and apparatus for cleaning of semiconductor device |
JPH03126054U (en) * | 1990-04-03 | 1991-12-19 | ||
JPH0587600U (en) * | 1991-09-20 | 1993-11-26 | 石川島播磨重工業株式会社 | Vitrification decontamination equipment |
JP2017183553A (en) * | 2016-03-30 | 2017-10-05 | 株式会社荏原製作所 | Substrate cleaning device and substrate processing apparatus |
JP2017195335A (en) * | 2016-04-22 | 2017-10-26 | 株式会社荏原製作所 | Substrate cleaning device |
US11676827B2 (en) | 2016-03-08 | 2023-06-13 | Ebara Corporation | Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus |
-
1979
- 1979-10-23 JP JP13718879A patent/JPS5660677A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02257632A (en) * | 1989-03-30 | 1990-10-18 | Toshiba Corp | Method and apparatus for cleaning of semiconductor device |
JPH03126054U (en) * | 1990-04-03 | 1991-12-19 | ||
JPH0587600U (en) * | 1991-09-20 | 1993-11-26 | 石川島播磨重工業株式会社 | Vitrification decontamination equipment |
US11676827B2 (en) | 2016-03-08 | 2023-06-13 | Ebara Corporation | Substrate cleaning apparatus, substrate cleaning method, substrate processing apparatus, and substrate drying apparatus |
JP2017183553A (en) * | 2016-03-30 | 2017-10-05 | 株式会社荏原製作所 | Substrate cleaning device and substrate processing apparatus |
JP2017195335A (en) * | 2016-04-22 | 2017-10-26 | 株式会社荏原製作所 | Substrate cleaning device |
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