JPS5654331A - Volumetric pressure sensor - Google Patents

Volumetric pressure sensor

Info

Publication number
JPS5654331A
JPS5654331A JP12865380A JP12865380A JPS5654331A JP S5654331 A JPS5654331 A JP S5654331A JP 12865380 A JP12865380 A JP 12865380A JP 12865380 A JP12865380 A JP 12865380A JP S5654331 A JPS5654331 A JP S5654331A
Authority
JP
Japan
Prior art keywords
pressure sensor
volumetric pressure
volumetric
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12865380A
Other languages
English (en)
Japanese (ja)
Inventor
Burukeru Rainaa
Manueru Piteira Fuerunando
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of JPS5654331A publication Critical patent/JPS5654331A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP12865380A 1979-09-21 1980-09-18 Volumetric pressure sensor Pending JPS5654331A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19792938205 DE2938205A1 (de) 1979-09-21 1979-09-21 Kapazitiver druckgeber und auswerteeinrichtung hierfuer

Publications (1)

Publication Number Publication Date
JPS5654331A true JPS5654331A (en) 1981-05-14

Family

ID=6081461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12865380A Pending JPS5654331A (en) 1979-09-21 1980-09-18 Volumetric pressure sensor

Country Status (7)

Country Link
JP (1) JPS5654331A (fr)
BR (1) BR8005996A (fr)
DE (1) DE2938205A1 (fr)
FR (1) FR2466012A1 (fr)
GB (1) GB2059071B (fr)
IT (1) IT1132979B (fr)
SE (1) SE8006587L (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6438546U (fr) * 1987-09-02 1989-03-08
JPH0159838U (fr) * 1987-10-13 1989-04-14
JPH01136041A (ja) * 1987-11-24 1989-05-29 Tokin Corp 静電容量式荷重センサ
JPH0197229U (fr) * 1987-12-19 1989-06-28
JPH0243625U (fr) * 1988-09-16 1990-03-26
JPH0542353Y2 (fr) * 1987-11-13 1993-10-26

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3128032A1 (de) * 1981-07-16 1983-02-03 Robert Bosch Gmbh, 7000 Stuttgart Anordnung zur erfassung eines druckes
DE3337978A1 (de) * 1983-10-19 1985-05-15 Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5000 Köln Vorrichtung zum messen von drucken und zeitlichen druckverlaeufen
FI842307A (fi) * 1984-06-07 1985-12-08 Vaisala Oy Foerfarande foer aostadkommande av genomfoering i en mikromekanisk konstruktion.
US4658358A (en) * 1984-06-13 1987-04-14 Battelle Memorial Institute Underwater computer
FI75426C (fi) * 1984-10-11 1988-06-09 Vaisala Oy Absoluttryckgivare.
US4617606A (en) * 1985-01-31 1986-10-14 Motorola, Inc. Capacitive pressure transducer
DE3523104A1 (de) * 1985-06-28 1987-01-22 Leybold Heraeus Gmbh & Co Kg Anordnung mit einer messelektrode, der in festen abstaenden eine erste und eine zweite felderzeugende elektrode zugeordnet sind
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US4774626A (en) * 1986-05-05 1988-09-27 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US4716492A (en) * 1986-05-05 1987-12-29 Texas Instruments Incorporated Pressure sensor with improved capacitive pressure transducer
US4872945A (en) * 1986-06-25 1989-10-10 Motorola Inc. Post seal etching of transducer diaphragm
DE3638978C2 (de) * 1986-11-14 1996-04-25 Teves Gmbh Alfred Elektrohydraulische Vorrichtung zur kontinuierlichen Überwachung des Druckes in einer hydraulischen Kraftfahrzeug-Bremsanlage
DE3912217A1 (de) * 1989-04-13 1990-10-18 Endress Hauser Gmbh Co Drucksensor
FR2775075B1 (fr) 1998-02-18 2000-05-05 Theobald Sa A Capteur de pression differentielle
DE102008034350A1 (de) * 2008-07-23 2010-02-11 Continental Automotive Gmbh Sensormembran für einen Drucksensor sowie Herstellungsverfahren dafür

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4168517A (en) * 1977-11-10 1979-09-18 Lee Shih Y Capacitive pressure transducer

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6438546U (fr) * 1987-09-02 1989-03-08
JPH0159838U (fr) * 1987-10-13 1989-04-14
JPH0542353Y2 (fr) * 1987-11-13 1993-10-26
JPH01136041A (ja) * 1987-11-24 1989-05-29 Tokin Corp 静電容量式荷重センサ
JPH0197229U (fr) * 1987-12-19 1989-06-28
JPH0243625U (fr) * 1988-09-16 1990-03-26

Also Published As

Publication number Publication date
IT1132979B (it) 1986-07-09
SE8006587L (sv) 1981-03-22
BR8005996A (pt) 1981-03-31
IT8024775A0 (it) 1980-09-19
GB2059071B (en) 1983-07-06
GB2059071A (en) 1981-04-15
FR2466012A1 (fr) 1981-03-27
FR2466012B1 (fr) 1984-10-19
DE2938205A1 (de) 1981-04-09

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