JPS5652859A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS5652859A
JPS5652859A JP12796879A JP12796879A JPS5652859A JP S5652859 A JPS5652859 A JP S5652859A JP 12796879 A JP12796879 A JP 12796879A JP 12796879 A JP12796879 A JP 12796879A JP S5652859 A JPS5652859 A JP S5652859A
Authority
JP
Japan
Prior art keywords
object lens
lens
scanning electron
scanning
correction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12796879A
Other languages
English (en)
Other versions
JPS5945173B2 (ja
Inventor
Minoru Saito
Hiroyoshi Mori
Hisahiro Furuya
Kimio Kanda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12796879A priority Critical patent/JPS5945173B2/ja
Publication of JPS5652859A publication Critical patent/JPS5652859A/ja
Publication of JPS5945173B2 publication Critical patent/JPS5945173B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP12796879A 1979-10-05 1979-10-05 走査電子顕微鏡 Expired JPS5945173B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12796879A JPS5945173B2 (ja) 1979-10-05 1979-10-05 走査電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12796879A JPS5945173B2 (ja) 1979-10-05 1979-10-05 走査電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5652859A true JPS5652859A (en) 1981-05-12
JPS5945173B2 JPS5945173B2 (ja) 1984-11-05

Family

ID=14973132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12796879A Expired JPS5945173B2 (ja) 1979-10-05 1979-10-05 走査電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5945173B2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050850A (ja) * 1983-08-31 1985-03-20 Jeol Ltd 走査電子顕微鏡
WO2019234787A1 (ja) * 2018-06-04 2019-12-12 株式会社日立ハイテクノロジーズ 電子線装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6050850A (ja) * 1983-08-31 1985-03-20 Jeol Ltd 走査電子顕微鏡
JPH0542102B2 (ja) * 1983-08-31 1993-06-25 Nippon Electron Optics Lab
WO2019234787A1 (ja) * 2018-06-04 2019-12-12 株式会社日立ハイテクノロジーズ 電子線装置
JPWO2019234787A1 (ja) * 2018-06-04 2021-06-10 株式会社日立ハイテク 電子線装置

Also Published As

Publication number Publication date
JPS5945173B2 (ja) 1984-11-05

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