JPS5652853B2 - - Google Patents
Info
- Publication number
- JPS5652853B2 JPS5652853B2 JP4848676A JP4848676A JPS5652853B2 JP S5652853 B2 JPS5652853 B2 JP S5652853B2 JP 4848676 A JP4848676 A JP 4848676A JP 4848676 A JP4848676 A JP 4848676A JP S5652853 B2 JPS5652853 B2 JP S5652853B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4848676A JPS52133085A (en) | 1976-04-30 | 1976-04-30 | Production of single silicon crystal of high purity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4848676A JPS52133085A (en) | 1976-04-30 | 1976-04-30 | Production of single silicon crystal of high purity |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52133085A JPS52133085A (en) | 1977-11-08 |
| JPS5652853B2 true JPS5652853B2 (enExample) | 1981-12-15 |
Family
ID=12804706
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4848676A Granted JPS52133085A (en) | 1976-04-30 | 1976-04-30 | Production of single silicon crystal of high purity |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52133085A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100406378C (zh) | 2000-05-11 | 2008-07-30 | 德山株式会社 | 多晶硅的生产装置 |
-
1976
- 1976-04-30 JP JP4848676A patent/JPS52133085A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52133085A (en) | 1977-11-08 |