JPS52133085A - Production of single silicon crystal of high purity - Google Patents

Production of single silicon crystal of high purity

Info

Publication number
JPS52133085A
JPS52133085A JP4848676A JP4848676A JPS52133085A JP S52133085 A JPS52133085 A JP S52133085A JP 4848676 A JP4848676 A JP 4848676A JP 4848676 A JP4848676 A JP 4848676A JP S52133085 A JPS52133085 A JP S52133085A
Authority
JP
Japan
Prior art keywords
high purity
production
silicon crystal
single silicon
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4848676A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5652853B2 (enExample
Inventor
Fukuhiko Suga
Kenji Tomizawa
Shinichiro Kobayashi
Hiroshi Kudo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Metal Corp
Original Assignee
Mitsubishi Metal Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Metal Corp filed Critical Mitsubishi Metal Corp
Priority to JP4848676A priority Critical patent/JPS52133085A/ja
Publication of JPS52133085A publication Critical patent/JPS52133085A/ja
Publication of JPS5652853B2 publication Critical patent/JPS5652853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP4848676A 1976-04-30 1976-04-30 Production of single silicon crystal of high purity Granted JPS52133085A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4848676A JPS52133085A (en) 1976-04-30 1976-04-30 Production of single silicon crystal of high purity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4848676A JPS52133085A (en) 1976-04-30 1976-04-30 Production of single silicon crystal of high purity

Publications (2)

Publication Number Publication Date
JPS52133085A true JPS52133085A (en) 1977-11-08
JPS5652853B2 JPS5652853B2 (enExample) 1981-12-15

Family

ID=12804706

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4848676A Granted JPS52133085A (en) 1976-04-30 1976-04-30 Production of single silicon crystal of high purity

Country Status (1)

Country Link
JP (1) JPS52133085A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6861144B2 (en) 2000-05-11 2005-03-01 Tokuyama Corporation Polycrystalline silicon and process and apparatus for producing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6861144B2 (en) 2000-05-11 2005-03-01 Tokuyama Corporation Polycrystalline silicon and process and apparatus for producing the same

Also Published As

Publication number Publication date
JPS5652853B2 (enExample) 1981-12-15

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