JPS5649454B2 - - Google Patents
Info
- Publication number
- JPS5649454B2 JPS5649454B2 JP2515076A JP2515076A JPS5649454B2 JP S5649454 B2 JPS5649454 B2 JP S5649454B2 JP 2515076 A JP2515076 A JP 2515076A JP 2515076 A JP2515076 A JP 2515076A JP S5649454 B2 JPS5649454 B2 JP S5649454B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2515076A JPS52109371A (en) | 1976-03-10 | 1976-03-10 | Manufacture of semiconductor device |
| NLAANVRAGE7613799,A NL171942C (nl) | 1976-02-13 | 1976-12-10 | Werkwijze voor het vervaardigen van een halfgeleiderinrichting, waarbij op een halfgeleiderlichaam een menglaag van nitriden van silicium en germanium wordt aangebracht. |
| US05/756,863 US4126880A (en) | 1976-02-13 | 1977-01-04 | Germanium-containing silicon nitride film |
| DE2705902A DE2705902C3 (de) | 1976-02-13 | 1977-02-11 | Germanium enthaltender Siüciumnitrid-Film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2515076A JPS52109371A (en) | 1976-03-10 | 1976-03-10 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52109371A JPS52109371A (en) | 1977-09-13 |
| JPS5649454B2 true JPS5649454B2 (de) | 1981-11-21 |
Family
ID=12157962
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2515076A Granted JPS52109371A (en) | 1976-02-13 | 1976-03-10 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52109371A (de) |
-
1976
- 1976-03-10 JP JP2515076A patent/JPS52109371A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52109371A (en) | 1977-09-13 |