JPS5647950U - - Google Patents

Info

Publication number
JPS5647950U
JPS5647950U JP13069479U JP13069479U JPS5647950U JP S5647950 U JPS5647950 U JP S5647950U JP 13069479 U JP13069479 U JP 13069479U JP 13069479 U JP13069479 U JP 13069479U JP S5647950 U JPS5647950 U JP S5647950U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13069479U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13069479U priority Critical patent/JPS5647950U/ja
Publication of JPS5647950U publication Critical patent/JPS5647950U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gears, Cams (AREA)
  • Pivots And Pivotal Connections (AREA)
JP13069479U 1979-09-19 1979-09-19 Pending JPS5647950U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13069479U JPS5647950U (enrdf_load_stackoverflow) 1979-09-19 1979-09-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13069479U JPS5647950U (enrdf_load_stackoverflow) 1979-09-19 1979-09-19

Publications (1)

Publication Number Publication Date
JPS5647950U true JPS5647950U (enrdf_load_stackoverflow) 1981-04-28

Family

ID=29362389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13069479U Pending JPS5647950U (enrdf_load_stackoverflow) 1979-09-19 1979-09-19

Country Status (1)

Country Link
JP (1) JPS5647950U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168232A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 平行平板型ドライエツチング装置
JPS60117736A (ja) * 1983-11-30 1985-06-25 Nec Corp ベ−パ−エッチング方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58168232A (ja) * 1982-03-30 1983-10-04 Fujitsu Ltd 平行平板型ドライエツチング装置
JPS60117736A (ja) * 1983-11-30 1985-06-25 Nec Corp ベ−パ−エッチング方法

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