JPS5647708B2 - - Google Patents

Info

Publication number
JPS5647708B2
JPS5647708B2 JP1874073A JP1874073A JPS5647708B2 JP S5647708 B2 JPS5647708 B2 JP S5647708B2 JP 1874073 A JP1874073 A JP 1874073A JP 1874073 A JP1874073 A JP 1874073A JP S5647708 B2 JPS5647708 B2 JP S5647708B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1874073A
Other languages
Japanese (ja)
Other versions
JPS49107482A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1874073A priority Critical patent/JPS5647708B2/ja
Publication of JPS49107482A publication Critical patent/JPS49107482A/ja
Publication of JPS5647708B2 publication Critical patent/JPS5647708B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1874073A 1973-02-15 1973-02-15 Expired JPS5647708B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1874073A JPS5647708B2 (cs) 1973-02-15 1973-02-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1874073A JPS5647708B2 (cs) 1973-02-15 1973-02-15

Publications (2)

Publication Number Publication Date
JPS49107482A JPS49107482A (cs) 1974-10-12
JPS5647708B2 true JPS5647708B2 (cs) 1981-11-11

Family

ID=11980052

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1874073A Expired JPS5647708B2 (cs) 1973-02-15 1973-02-15

Country Status (1)

Country Link
JP (1) JPS5647708B2 (cs)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52182A (en) * 1975-06-20 1977-01-05 Nec Corp Method of forming planar type fet electrodes
CA1131367A (en) * 1978-11-13 1982-09-07 Keming W. Yeh Self-aligned mesfet having reduced series resistance
JPH03171621A (ja) * 1989-11-29 1991-07-25 Mitsubishi Electric Corp 多層膜構造の半導体装置およびその製造方法
JPH03173126A (ja) * 1989-11-30 1991-07-26 Mitsubishi Electric Corp 多層膜構造の半導体装置およびその製造方法

Also Published As

Publication number Publication date
JPS49107482A (cs) 1974-10-12

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