JPS5646191B2 - - Google Patents
Info
- Publication number
- JPS5646191B2 JPS5646191B2 JP6495077A JP6495077A JPS5646191B2 JP S5646191 B2 JPS5646191 B2 JP S5646191B2 JP 6495077 A JP6495077 A JP 6495077A JP 6495077 A JP6495077 A JP 6495077A JP S5646191 B2 JPS5646191 B2 JP S5646191B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B39/00—Circuit arrangements or apparatus for operating incandescent light sources
- H05B39/04—Controlling
- H05B39/08—Controlling by shifting phase of trigger voltage applied to gas-filled controlling tubes also in controlled semiconductor devices
- H05B39/083—Controlling by shifting phase of trigger voltage applied to gas-filled controlling tubes also in controlled semiconductor devices by the variation-rate of light intensity
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Engineering & Computer Science (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Toxicology (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Image Processing (AREA)
- Image Analysis (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US05/701,337 US4056716A (en) | 1976-06-30 | 1976-06-30 | Defect inspection of objects such as electronic circuits |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS533757A JPS533757A (en) | 1978-01-13 |
JPS5646191B2 true JPS5646191B2 (xx) | 1981-10-31 |
Family
ID=24816960
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6495077A Granted JPS533757A (en) | 1976-06-30 | 1977-06-03 | Comparator for automatic checker |
Country Status (5)
Country | Link |
---|---|
US (1) | US4056716A (xx) |
JP (1) | JPS533757A (xx) |
DE (1) | DE2726746C3 (xx) |
FR (1) | FR2357010A1 (xx) |
GB (1) | GB1579290A (xx) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63123077U (xx) * | 1987-02-05 | 1988-08-10 | ||
JPH0226144Y2 (xx) * | 1987-03-02 | 1990-07-17 | ||
JPH0352982U (xx) * | 1989-09-29 | 1991-05-22 |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5371563A (en) * | 1976-12-08 | 1978-06-26 | Hitachi Ltd | Automatic inspection correcting method for mask |
US4295198A (en) * | 1979-04-02 | 1981-10-13 | Cogit Systems, Inc. | Automatic printed circuit dimensioning, routing and inspecting apparatus |
IT1129509B (it) * | 1980-01-14 | 1986-06-04 | Tasco Spa | Procedimento ed apparecchiatura per il ritrovamento in tempo reale di difetti in oggetti industriali |
US4486775A (en) * | 1980-10-17 | 1984-12-04 | Micro Consultants Limited | Object recognition |
SE449531B (sv) * | 1980-12-11 | 1987-05-04 | Gerhard Westerberg | Forfarande och anordning for kontroll av mikromasker |
DE3070433D1 (en) * | 1980-12-18 | 1985-05-09 | Ibm | Method for the inspection and automatic sorting of objects with configurations of fixed dimensional tolerances, and device for carrying out the method |
EP0054596B1 (fr) * | 1980-12-18 | 1985-05-29 | International Business Machines Corporation | Procédé d'inspection et de tri automatique d'objets présentant des configurations avec des tolérances dimensionnelles et des critères de rejet variables selon l'emplacement, équipement et circuits de mise en oeuvre |
US4415980A (en) * | 1981-03-02 | 1983-11-15 | Lockheed Missiles & Space Co., Inc. | Automated radiographic inspection system |
US4578279A (en) * | 1981-05-26 | 1986-03-25 | International Business Machines Corporation | Inspection of multilayer ceramic circuit modules by electrical inspection of unfired green sheets |
DE3267548D1 (en) * | 1982-05-28 | 1986-01-02 | Ibm Deutschland | Process and device for an automatic optical inspection |
JPS58208886A (ja) * | 1982-05-31 | 1983-12-05 | 武蔵エンジニアリング株式会社 | 紙葉の表裏判別方法 |
GB2124362A (en) * | 1982-07-22 | 1984-02-15 | Marconi Co Ltd | Printed circuit board inspection |
DE3314465A1 (de) * | 1983-04-21 | 1984-10-25 | Robert Bosch Gmbh, 7000 Stuttgart | Verfahren zur optischen oberflaechenpruefung |
JPH0750664B2 (ja) * | 1983-06-23 | 1995-05-31 | 富士通株式会社 | レチクルの検査方法 |
US4575630A (en) * | 1984-01-30 | 1986-03-11 | Ibm Corporation | Electron-beam testing of semiconductor wafers |
JPS60263807A (ja) * | 1984-06-12 | 1985-12-27 | Dainippon Screen Mfg Co Ltd | プリント配線板のパタ−ン欠陥検査装置 |
US4853967A (en) * | 1984-06-29 | 1989-08-01 | International Business Machines Corporation | Method for automatic optical inspection analysis of integrated circuits |
GB8418116D0 (en) * | 1984-07-17 | 1984-08-22 | Electronic Automation Ltd | Data processing |
US4659220A (en) * | 1984-10-22 | 1987-04-21 | International Business Machines Corporation | Optical inspection system for semiconductor wafers |
JPH0616013B2 (ja) * | 1984-11-22 | 1994-03-02 | 肇産業株式会社 | 自動検査装置 |
US4679938A (en) * | 1985-06-03 | 1987-07-14 | International Business Machines Corporation | Defect detection in films on ceramic substrates |
JPS6261390A (ja) * | 1985-09-11 | 1987-03-18 | 興和株式会社 | プリント基板検査方法およびその装置 |
DE3540100A1 (de) * | 1985-11-12 | 1987-06-11 | Mania Gmbh | Verfahren zur optischen pruefung von leiterplatten |
US4965515A (en) * | 1986-10-15 | 1990-10-23 | Tokyo Electron Limited | Apparatus and method of testing a semiconductor wafer |
US4949390A (en) * | 1987-04-16 | 1990-08-14 | Applied Vision Systems, Inc. | Interconnect verification using serial neighborhood processors |
KR0152260B1 (ko) * | 1988-07-08 | 1998-12-15 | 고다까 토시오 | 프로우브 장치 |
GB2247312B (en) * | 1990-07-16 | 1994-01-26 | Univ Brunel | Surface inspection |
US5231675A (en) * | 1990-08-31 | 1993-07-27 | The Boeing Company | Sheet metal inspection system and apparatus |
JPH07117498B2 (ja) * | 1991-12-11 | 1995-12-18 | インターナショナル・ビジネス・マシーンズ・コーポレイション | 検査システム |
US5530652A (en) * | 1993-08-11 | 1996-06-25 | Levi Strauss & Co. | Automatic garment inspection and measurement system |
US6556703B1 (en) * | 1997-10-24 | 2003-04-29 | Agere Systems Inc. | Scanning electron microscope system and method of manufacturing an integrated circuit |
US6980687B2 (en) * | 2000-10-02 | 2005-12-27 | Kabushiki Kaisha Topcon | Chip inspecting apparatus and method |
US8131055B2 (en) * | 2008-01-31 | 2012-03-06 | Caterpillar Inc. | System and method for assembly inspection |
KR101231597B1 (ko) * | 2010-11-15 | 2013-02-08 | 주식회사 고영테크놀러지 | 검사방법 |
WO2020176908A1 (en) * | 2019-02-28 | 2020-09-03 | Nanotronics Imaging, Inc. | Assembly error correction for assembly lines |
CN113544604A (zh) * | 2019-04-19 | 2021-10-22 | 纳米电子成像有限公司 | 流水线的装配误差校正 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3463007A (en) * | 1967-02-27 | 1969-08-26 | North American Rockwell | Field gradient correlator system for field effect testing |
JPS5137494B1 (xx) * | 1968-01-18 | 1976-10-15 | ||
DE2121330C3 (de) * | 1971-04-30 | 1974-10-17 | Ludwig 6369 Dortelweil Illian | Verfahren und Schaltungsanordnung zum Prüfen digital arbeitender elektronischer Geräte und ihrer Bauteile |
JPS4934385A (xx) * | 1972-07-28 | 1974-03-29 | ||
US3760355A (en) * | 1972-03-08 | 1973-09-18 | Motorola Inc | Digital pattern detector |
FR2189870B1 (xx) * | 1972-06-23 | 1977-06-17 | Thomson Csf | |
US3790767A (en) * | 1972-12-04 | 1974-02-05 | A Alexander | Pulse analyzing tester |
US3908118A (en) * | 1973-09-27 | 1975-09-23 | California Inst Of Techn | Cross correlation anomaly detection system |
US3889053A (en) * | 1973-10-30 | 1975-06-10 | Westinghouse Electric Corp | Contactless test system |
US3991302A (en) * | 1974-11-22 | 1976-11-09 | Grumman Aerospace Corporation | Method for detecting and isolating faults in digital and analog circuits with multiple infrared scanning under conditions of different stimuli |
-
1976
- 1976-06-30 US US05/701,337 patent/US4056716A/en not_active Expired - Lifetime
-
1977
- 1977-05-25 FR FR7716789A patent/FR2357010A1/fr active Granted
- 1977-06-03 JP JP6495077A patent/JPS533757A/ja active Granted
- 1977-06-13 GB GB24594/77A patent/GB1579290A/en not_active Expired
- 1977-06-14 DE DE2726746A patent/DE2726746C3/de not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63123077U (xx) * | 1987-02-05 | 1988-08-10 | ||
JPH0226144Y2 (xx) * | 1987-03-02 | 1990-07-17 | ||
JPH0352982U (xx) * | 1989-09-29 | 1991-05-22 |
Also Published As
Publication number | Publication date |
---|---|
FR2357010A1 (fr) | 1978-01-27 |
GB1579290A (en) | 1980-11-19 |
DE2726746B2 (de) | 1979-07-12 |
JPS533757A (en) | 1978-01-13 |
DE2726746A1 (de) | 1978-01-05 |
DE2726746C3 (de) | 1981-12-03 |
FR2357010B1 (xx) | 1980-07-11 |
US4056716A (en) | 1977-11-01 |