JPS5646191B2 - - Google Patents

Info

Publication number
JPS5646191B2
JPS5646191B2 JP6495077A JP6495077A JPS5646191B2 JP S5646191 B2 JPS5646191 B2 JP S5646191B2 JP 6495077 A JP6495077 A JP 6495077A JP 6495077 A JP6495077 A JP 6495077A JP S5646191 B2 JPS5646191 B2 JP S5646191B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6495077A
Other languages
Japanese (ja)
Other versions
JPS533757A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS533757A publication Critical patent/JPS533757A/ja
Publication of JPS5646191B2 publication Critical patent/JPS5646191B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B39/00—Circuit arrangements or apparatus for operating incandescent light sources
    • H05B39/04—Controlling
    • H05B39/08—Controlling by shifting phase of trigger voltage applied to gas-filled controlling tubes also in controlled semiconductor devices
    • H05B39/083—Controlling by shifting phase of trigger voltage applied to gas-filled controlling tubes also in controlled semiconductor devices by the variation-rate of light intensity

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP6495077A 1976-06-30 1977-06-03 Comparator for automatic checker Granted JPS533757A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/701,337 US4056716A (en) 1976-06-30 1976-06-30 Defect inspection of objects such as electronic circuits

Publications (2)

Publication Number Publication Date
JPS533757A JPS533757A (en) 1978-01-13
JPS5646191B2 true JPS5646191B2 (xx) 1981-10-31

Family

ID=24816960

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6495077A Granted JPS533757A (en) 1976-06-30 1977-06-03 Comparator for automatic checker

Country Status (5)

Country Link
US (1) US4056716A (xx)
JP (1) JPS533757A (xx)
DE (1) DE2726746C3 (xx)
FR (1) FR2357010A1 (xx)
GB (1) GB1579290A (xx)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63123077U (xx) * 1987-02-05 1988-08-10
JPH0226144Y2 (xx) * 1987-03-02 1990-07-17
JPH0352982U (xx) * 1989-09-29 1991-05-22

Families Citing this family (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5371563A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Automatic inspection correcting method for mask
US4295198A (en) * 1979-04-02 1981-10-13 Cogit Systems, Inc. Automatic printed circuit dimensioning, routing and inspecting apparatus
IT1129509B (it) * 1980-01-14 1986-06-04 Tasco Spa Procedimento ed apparecchiatura per il ritrovamento in tempo reale di difetti in oggetti industriali
US4486775A (en) * 1980-10-17 1984-12-04 Micro Consultants Limited Object recognition
SE449531B (sv) * 1980-12-11 1987-05-04 Gerhard Westerberg Forfarande och anordning for kontroll av mikromasker
DE3070433D1 (en) * 1980-12-18 1985-05-09 Ibm Method for the inspection and automatic sorting of objects with configurations of fixed dimensional tolerances, and device for carrying out the method
EP0054596B1 (fr) * 1980-12-18 1985-05-29 International Business Machines Corporation Procédé d'inspection et de tri automatique d'objets présentant des configurations avec des tolérances dimensionnelles et des critères de rejet variables selon l'emplacement, équipement et circuits de mise en oeuvre
US4415980A (en) * 1981-03-02 1983-11-15 Lockheed Missiles & Space Co., Inc. Automated radiographic inspection system
US4578279A (en) * 1981-05-26 1986-03-25 International Business Machines Corporation Inspection of multilayer ceramic circuit modules by electrical inspection of unfired green sheets
EP0095517B1 (de) * 1982-05-28 1985-11-21 Ibm Deutschland Gmbh Verfahren und Einrichtung zur automatischen optischen Inspektion
JPS58208886A (ja) * 1982-05-31 1983-12-05 武蔵エンジニアリング株式会社 紙葉の表裏判別方法
GB2124362A (en) * 1982-07-22 1984-02-15 Marconi Co Ltd Printed circuit board inspection
DE3314465A1 (de) * 1983-04-21 1984-10-25 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zur optischen oberflaechenpruefung
JPH0750664B2 (ja) * 1983-06-23 1995-05-31 富士通株式会社 レチクルの検査方法
US4575630A (en) * 1984-01-30 1986-03-11 Ibm Corporation Electron-beam testing of semiconductor wafers
JPS60263807A (ja) * 1984-06-12 1985-12-27 Dainippon Screen Mfg Co Ltd プリント配線板のパタ−ン欠陥検査装置
US4853967A (en) * 1984-06-29 1989-08-01 International Business Machines Corporation Method for automatic optical inspection analysis of integrated circuits
GB8418116D0 (en) * 1984-07-17 1984-08-22 Electronic Automation Ltd Data processing
US4659220A (en) * 1984-10-22 1987-04-21 International Business Machines Corporation Optical inspection system for semiconductor wafers
JPH0616013B2 (ja) * 1984-11-22 1994-03-02 肇産業株式会社 自動検査装置
US4679938A (en) * 1985-06-03 1987-07-14 International Business Machines Corporation Defect detection in films on ceramic substrates
JPS6261390A (ja) * 1985-09-11 1987-03-18 興和株式会社 プリント基板検査方法およびその装置
DE3540100A1 (de) * 1985-11-12 1987-06-11 Mania Gmbh Verfahren zur optischen pruefung von leiterplatten
US4965515A (en) * 1986-10-15 1990-10-23 Tokyo Electron Limited Apparatus and method of testing a semiconductor wafer
US4949390A (en) * 1987-04-16 1990-08-14 Applied Vision Systems, Inc. Interconnect verification using serial neighborhood processors
KR0152260B1 (ko) * 1988-07-08 1998-12-15 고다까 토시오 프로우브 장치
GB2247312B (en) * 1990-07-16 1994-01-26 Univ Brunel Surface inspection
US5231675A (en) * 1990-08-31 1993-07-27 The Boeing Company Sheet metal inspection system and apparatus
JPH07117498B2 (ja) * 1991-12-11 1995-12-18 インターナショナル・ビジネス・マシーンズ・コーポレイション 検査システム
US5530652A (en) * 1993-08-11 1996-06-25 Levi Strauss & Co. Automatic garment inspection and measurement system
US6556703B1 (en) * 1997-10-24 2003-04-29 Agere Systems Inc. Scanning electron microscope system and method of manufacturing an integrated circuit
US6980687B2 (en) * 2000-10-02 2005-12-27 Kabushiki Kaisha Topcon Chip inspecting apparatus and method
US8131055B2 (en) * 2008-01-31 2012-03-06 Caterpillar Inc. System and method for assembly inspection
KR101231597B1 (ko) * 2010-11-15 2013-02-08 주식회사 고영테크놀러지 검사방법
EP3912003A4 (en) * 2019-02-28 2022-10-12 Nanotronics Imaging, Inc. ASSEMBLY ERROR CORRECTION FOR ASSEMBLY LINES
JP7207790B2 (ja) * 2019-04-19 2023-01-18 ナノトロニクス イメージング インコーポレイテッド 組立てラインのための組立てエラー修正

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3463007A (en) * 1967-02-27 1969-08-26 North American Rockwell Field gradient correlator system for field effect testing
JPS5137494B1 (xx) * 1968-01-18 1976-10-15
DE2121330C3 (de) * 1971-04-30 1974-10-17 Ludwig 6369 Dortelweil Illian Verfahren und Schaltungsanordnung zum Prüfen digital arbeitender elektronischer Geräte und ihrer Bauteile
JPS4934385A (xx) * 1972-07-28 1974-03-29
US3760355A (en) * 1972-03-08 1973-09-18 Motorola Inc Digital pattern detector
FR2189870B1 (xx) * 1972-06-23 1977-06-17 Thomson Csf
US3790767A (en) * 1972-12-04 1974-02-05 A Alexander Pulse analyzing tester
US3908118A (en) * 1973-09-27 1975-09-23 California Inst Of Techn Cross correlation anomaly detection system
US3889053A (en) * 1973-10-30 1975-06-10 Westinghouse Electric Corp Contactless test system
US3991302A (en) * 1974-11-22 1976-11-09 Grumman Aerospace Corporation Method for detecting and isolating faults in digital and analog circuits with multiple infrared scanning under conditions of different stimuli

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63123077U (xx) * 1987-02-05 1988-08-10
JPH0226144Y2 (xx) * 1987-03-02 1990-07-17
JPH0352982U (xx) * 1989-09-29 1991-05-22

Also Published As

Publication number Publication date
FR2357010A1 (fr) 1978-01-27
DE2726746A1 (de) 1978-01-05
DE2726746B2 (de) 1979-07-12
JPS533757A (en) 1978-01-13
GB1579290A (en) 1980-11-19
US4056716A (en) 1977-11-01
FR2357010B1 (xx) 1980-07-11
DE2726746C3 (de) 1981-12-03

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