JPS5643818A - Surface elastic wave device and its manufacture - Google Patents

Surface elastic wave device and its manufacture

Info

Publication number
JPS5643818A
JPS5643818A JP11797979A JP11797979A JPS5643818A JP S5643818 A JPS5643818 A JP S5643818A JP 11797979 A JP11797979 A JP 11797979A JP 11797979 A JP11797979 A JP 11797979A JP S5643818 A JPS5643818 A JP S5643818A
Authority
JP
Japan
Prior art keywords
electrode fingers
manufacture
wave device
elastic wave
surface elastic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11797979A
Other languages
Japanese (ja)
Inventor
Hideo Abe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11797979A priority Critical patent/JPS5643818A/en
Publication of JPS5643818A publication Critical patent/JPS5643818A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves

Abstract

PURPOSE:To reduce the conductor resistance of a bus bar part by constituting an input-output interdigital transducer by stacking an electrode finger end part and a single-layer bas bar much thicker than the electrode fingers. CONSTITUTION:On piezoelectric substrate 1, cross electrode fingers 2 are formed. Next, single-layer bus bars 3 are formed which are much thicker than cross electrode fingers 2 and less in natural resistance.
JP11797979A 1979-09-17 1979-09-17 Surface elastic wave device and its manufacture Pending JPS5643818A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11797979A JPS5643818A (en) 1979-09-17 1979-09-17 Surface elastic wave device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11797979A JPS5643818A (en) 1979-09-17 1979-09-17 Surface elastic wave device and its manufacture

Publications (1)

Publication Number Publication Date
JPS5643818A true JPS5643818A (en) 1981-04-22

Family

ID=14725002

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11797979A Pending JPS5643818A (en) 1979-09-17 1979-09-17 Surface elastic wave device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5643818A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58178619A (en) * 1982-04-13 1983-10-19 Matsushita Electric Ind Co Ltd Element for surface acoustic wave
JPS62162208A (en) * 1986-01-13 1987-07-18 Pioneer Electronic Corp Magnetic head
JPS62117832U (en) * 1986-01-14 1987-07-27
US6946931B2 (en) * 2001-12-21 2005-09-20 Fujitsu Limited Surface acoustic wave resonator and surface acoustic wave filter
WO2012076517A1 (en) * 2010-12-07 2012-06-14 Epcos Ag Electroacoustic transducer with reduced losses due to transversal emission and improved performance due to suppression of transversal modes
WO2016103953A1 (en) * 2014-12-25 2016-06-30 株式会社村田製作所 Acoustic wave device
WO2018199071A1 (en) * 2017-04-28 2018-11-01 株式会社村田製作所 Acoustic wave device manufacturing method and acoustic wave device
WO2024043343A1 (en) * 2022-08-26 2024-02-29 株式会社村田製作所 Acoustic wave device

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58178619A (en) * 1982-04-13 1983-10-19 Matsushita Electric Ind Co Ltd Element for surface acoustic wave
JPS62162208A (en) * 1986-01-13 1987-07-18 Pioneer Electronic Corp Magnetic head
JPS62117832U (en) * 1986-01-14 1987-07-27
US6946931B2 (en) * 2001-12-21 2005-09-20 Fujitsu Limited Surface acoustic wave resonator and surface acoustic wave filter
US9391256B2 (en) 2010-12-07 2016-07-12 Epcos Ag Electroacoustic transducer with reduced losses due to transverse emission and improved performance due to suppression of transverse modes
WO2012076517A1 (en) * 2010-12-07 2012-06-14 Epcos Ag Electroacoustic transducer with reduced losses due to transversal emission and improved performance due to suppression of transversal modes
JP2014500681A (en) * 2010-12-07 2014-01-09 エプコス アクチエンゲゼルシャフト Electroacoustic transducer with reduced loss due to lateral emission and improved operation by suppressing lateral modes
WO2016103953A1 (en) * 2014-12-25 2016-06-30 株式会社村田製作所 Acoustic wave device
JPWO2016103953A1 (en) * 2014-12-25 2017-08-03 株式会社村田製作所 Elastic wave device
US10256793B2 (en) 2014-12-25 2019-04-09 Murata Manufacturing Co., Ltd. Elastic wave detection
WO2018199071A1 (en) * 2017-04-28 2018-11-01 株式会社村田製作所 Acoustic wave device manufacturing method and acoustic wave device
JPWO2018199071A1 (en) * 2017-04-28 2019-12-19 株式会社村田製作所 Method of manufacturing elastic wave device and elastic wave device
WO2024043343A1 (en) * 2022-08-26 2024-02-29 株式会社村田製作所 Acoustic wave device

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