JPS5639514A - Laser scanning microscope - Google Patents

Laser scanning microscope

Info

Publication number
JPS5639514A
JPS5639514A JP11588979A JP11588979A JPS5639514A JP S5639514 A JPS5639514 A JP S5639514A JP 11588979 A JP11588979 A JP 11588979A JP 11588979 A JP11588979 A JP 11588979A JP S5639514 A JPS5639514 A JP S5639514A
Authority
JP
Japan
Prior art keywords
light absorption
operations
sample
absorption current
measurement conditions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11588979A
Other languages
Japanese (ja)
Inventor
Masashi Nagase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP11588979A priority Critical patent/JPS5639514A/en
Publication of JPS5639514A publication Critical patent/JPS5639514A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To make possible simultaneous displaying of the images of the results of operations without requiring any memory device by performing operations such as of mutually differences, sums, etc. while sample-holding the light absorptions current in the circuit operation states corresponding to the mutually different measurement conditions. CONSTITUTION:The laser beam through X-, Y-scanning drive units 2, 3, and a focusing lens system 4 is irradiated to a sample semiconductor device 5, and the signal accompanying light absorption current is detected from the semiconductor device 5 and the light absorption current image is observed. Plural sample holding curcuits 17, 18, 28, 29, 35, 37, arithmetic circuit 25, circuits 26, 27 time-dividing and distributing sampling pluses are provided to such device. While the light absorption current in the circuit operation states corresponding to the mutually different measurement conditions is being sample-held along with the scanning of the laser beam, the operations of mutual differences, sums, etc. are performed and the light absorption current images corresponding to the respective measurement conditions and the images of the results of the operations are simultaneously displayed in real time in monitoring oscilloscopes 16, 39, 40.
JP11588979A 1979-09-10 1979-09-10 Laser scanning microscope Pending JPS5639514A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11588979A JPS5639514A (en) 1979-09-10 1979-09-10 Laser scanning microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11588979A JPS5639514A (en) 1979-09-10 1979-09-10 Laser scanning microscope

Publications (1)

Publication Number Publication Date
JPS5639514A true JPS5639514A (en) 1981-04-15

Family

ID=14673692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11588979A Pending JPS5639514A (en) 1979-09-10 1979-09-10 Laser scanning microscope

Country Status (1)

Country Link
JP (1) JPS5639514A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871540A (en) * 1981-09-30 1983-04-28 イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング Scanning method for determining potential by electron beam measuring method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5871540A (en) * 1981-09-30 1983-04-28 イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング Scanning method for determining potential by electron beam measuring method

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