JPS5639223Y2 - - Google Patents
Info
- Publication number
- JPS5639223Y2 JPS5639223Y2 JP13676177U JP13676177U JPS5639223Y2 JP S5639223 Y2 JPS5639223 Y2 JP S5639223Y2 JP 13676177 U JP13676177 U JP 13676177U JP 13676177 U JP13676177 U JP 13676177U JP S5639223 Y2 JPS5639223 Y2 JP S5639223Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13676177U JPS5639223Y2 (ko) | 1977-10-14 | 1977-10-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13676177U JPS5639223Y2 (ko) | 1977-10-14 | 1977-10-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5464460U JPS5464460U (ko) | 1979-05-08 |
| JPS5639223Y2 true JPS5639223Y2 (ko) | 1981-09-12 |
Family
ID=29108298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13676177U Expired JPS5639223Y2 (ko) | 1977-10-14 | 1977-10-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5639223Y2 (ko) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561526A (en) * | 1979-06-15 | 1981-01-09 | Matsushita Electric Ind Co Ltd | Substrate holding jig for substrate treatment |
| JPH077792B2 (ja) * | 1986-07-31 | 1995-01-30 | 東京エレクトロン株式会社 | プラズマ装置 |
-
1977
- 1977-10-14 JP JP13676177U patent/JPS5639223Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5464460U (ko) | 1979-05-08 |