JPS5639223Y2 - - Google Patents

Info

Publication number
JPS5639223Y2
JPS5639223Y2 JP13676177U JP13676177U JPS5639223Y2 JP S5639223 Y2 JPS5639223 Y2 JP S5639223Y2 JP 13676177 U JP13676177 U JP 13676177U JP 13676177 U JP13676177 U JP 13676177U JP S5639223 Y2 JPS5639223 Y2 JP S5639223Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13676177U
Other languages
Japanese (ja)
Other versions
JPS5464460U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13676177U priority Critical patent/JPS5639223Y2/ja
Publication of JPS5464460U publication Critical patent/JPS5464460U/ja
Application granted granted Critical
Publication of JPS5639223Y2 publication Critical patent/JPS5639223Y2/ja
Expired legal-status Critical Current

Links

JP13676177U 1977-10-14 1977-10-14 Expired JPS5639223Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13676177U JPS5639223Y2 (enrdf_load_stackoverflow) 1977-10-14 1977-10-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13676177U JPS5639223Y2 (enrdf_load_stackoverflow) 1977-10-14 1977-10-14

Publications (2)

Publication Number Publication Date
JPS5464460U JPS5464460U (enrdf_load_stackoverflow) 1979-05-08
JPS5639223Y2 true JPS5639223Y2 (enrdf_load_stackoverflow) 1981-09-12

Family

ID=29108298

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13676177U Expired JPS5639223Y2 (enrdf_load_stackoverflow) 1977-10-14 1977-10-14

Country Status (1)

Country Link
JP (1) JPS5639223Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561526A (en) * 1979-06-15 1981-01-09 Matsushita Electric Ind Co Ltd Substrate holding jig for substrate treatment
JPH077792B2 (ja) * 1986-07-31 1995-01-30 東京エレクトロン株式会社 プラズマ装置

Also Published As

Publication number Publication date
JPS5464460U (enrdf_load_stackoverflow) 1979-05-08

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