JPS563665B2 - - Google Patents

Info

Publication number
JPS563665B2
JPS563665B2 JP768073A JP768073A JPS563665B2 JP S563665 B2 JPS563665 B2 JP S563665B2 JP 768073 A JP768073 A JP 768073A JP 768073 A JP768073 A JP 768073A JP S563665 B2 JPS563665 B2 JP S563665B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP768073A
Other languages
Japanese (ja)
Other versions
JPS4997571A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP768073A priority Critical patent/JPS563665B2/ja
Publication of JPS4997571A publication Critical patent/JPS4997571A/ja
Publication of JPS563665B2 publication Critical patent/JPS563665B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Electrodes Of Semiconductors (AREA)
JP768073A 1973-01-17 1973-01-17 Expired JPS563665B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP768073A JPS563665B2 (cs) 1973-01-17 1973-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP768073A JPS563665B2 (cs) 1973-01-17 1973-01-17

Publications (2)

Publication Number Publication Date
JPS4997571A JPS4997571A (cs) 1974-09-14
JPS563665B2 true JPS563665B2 (cs) 1981-01-26

Family

ID=11672491

Family Applications (1)

Application Number Title Priority Date Filing Date
JP768073A Expired JPS563665B2 (cs) 1973-01-17 1973-01-17

Country Status (1)

Country Link
JP (1) JPS563665B2 (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS586306B2 (ja) * 1974-10-25 1983-02-03 株式会社日立製作所 ハンドウタイソウチノ セイゾウホウホウ
JPS5214371A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Flattening method of concave-convex surface
JPS52124884A (en) * 1976-04-13 1977-10-20 Matsushita Electric Ind Co Ltd Production of semiconductor device
JPS5715423A (en) * 1980-07-01 1982-01-26 Fujitsu Ltd Manufacture of semiconductor device
JP5158905B2 (ja) * 2012-03-19 2013-03-06 古河電気工業株式会社 光回路基板およびその製造方法

Also Published As

Publication number Publication date
JPS4997571A (cs) 1974-09-14

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