JPS563660B2 - - Google Patents
Info
- Publication number
- JPS563660B2 JPS563660B2 JP14048576A JP14048576A JPS563660B2 JP S563660 B2 JPS563660 B2 JP S563660B2 JP 14048576 A JP14048576 A JP 14048576A JP 14048576 A JP14048576 A JP 14048576A JP S563660 B2 JPS563660 B2 JP S563660B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Control Of Position Or Direction (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14048576A JPS5364479A (en) | 1976-11-22 | 1976-11-22 | Position aligning system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14048576A JPS5364479A (en) | 1976-11-22 | 1976-11-22 | Position aligning system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5364479A JPS5364479A (en) | 1978-06-08 |
| JPS563660B2 true JPS563660B2 (en:Method) | 1981-01-26 |
Family
ID=15269690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14048576A Granted JPS5364479A (en) | 1976-11-22 | 1976-11-22 | Position aligning system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5364479A (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2562270Y2 (ja) * | 1991-04-23 | 1998-02-10 | 安藤電気株式会社 | 光による移動体の停止機構 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51120180A (en) * | 1975-04-15 | 1976-10-21 | Nippon Telegr & Teleph Corp <Ntt> | Pattern printing device |
-
1976
- 1976-11-22 JP JP14048576A patent/JPS5364479A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5364479A (en) | 1978-06-08 |