JPS5636527A - Etching solution for polyimide type resin film - Google Patents
Etching solution for polyimide type resin filmInfo
- Publication number
- JPS5636527A JPS5636527A JP8772380A JP8772380A JPS5636527A JP S5636527 A JPS5636527 A JP S5636527A JP 8772380 A JP8772380 A JP 8772380A JP 8772380 A JP8772380 A JP 8772380A JP S5636527 A JPS5636527 A JP S5636527A
- Authority
- JP
- Japan
- Prior art keywords
- etching solution
- type resin
- polyimide type
- hydrazine
- resin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Treatments Of Macromolecular Shaped Articles (AREA)
Abstract
PURPOSE: Titled etching solution which can provide high-accuracy working constantly, including hydrazine and a polyamine compound.
CONSTITUTION: The etching solution for selectively etching polyimide type resin films is obtained by using, as main components, (A) hydrazine and (B) a compound selected from polyamine compounds represented by the formula, wherein R is an atomic group containing at least one carbon atom. Examples of component (B) include ethylenediamine, trimethylenediamine, tetramethylenetriamine, pentamethylenediamine, hexamethylenediamine, diethylenetriamine and triethylenetetramine. Component (A) is contained in an amount of 90W20vol%, when calculated as hydrazine hydrate.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8772380A JPS5636527A (en) | 1980-06-30 | 1980-06-30 | Etching solution for polyimide type resin film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8772380A JPS5636527A (en) | 1980-06-30 | 1980-06-30 | Etching solution for polyimide type resin film |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12276876A Division JPS5349071A (en) | 1976-10-15 | 1976-10-15 | Selective etching of polyimide system film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5636527A true JPS5636527A (en) | 1981-04-09 |
Family
ID=13922824
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8772380A Pending JPS5636527A (en) | 1980-06-30 | 1980-06-30 | Etching solution for polyimide type resin film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5636527A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6461681B2 (en) * | 2001-01-08 | 2002-10-08 | Hewlett-Packard Company | Method of treating a surface of a polyimide |
-
1980
- 1980-06-30 JP JP8772380A patent/JPS5636527A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6461681B2 (en) * | 2001-01-08 | 2002-10-08 | Hewlett-Packard Company | Method of treating a surface of a polyimide |
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