JPS5636004A - Detecting method of configuration and apparatus thereof - Google Patents

Detecting method of configuration and apparatus thereof

Info

Publication number
JPS5636004A
JPS5636004A JP11170679A JP11170679A JPS5636004A JP S5636004 A JPS5636004 A JP S5636004A JP 11170679 A JP11170679 A JP 11170679A JP 11170679 A JP11170679 A JP 11170679A JP S5636004 A JPS5636004 A JP S5636004A
Authority
JP
Japan
Prior art keywords
detectors
dead angle
image
subject
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11170679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6153643B2 (enrdf_load_stackoverflow
Inventor
Yasuo Nakagawa
Hiroshi Makihira
Yoshisada Oshida
Nobuyuki Akiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11170679A priority Critical patent/JPS5636004A/ja
Priority to US06/181,768 priority patent/US4343553A/en
Publication of JPS5636004A publication Critical patent/JPS5636004A/ja
Publication of JPS6153643B2 publication Critical patent/JPS6153643B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP11170679A 1979-09-03 1979-09-03 Detecting method of configuration and apparatus thereof Granted JPS5636004A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP11170679A JPS5636004A (en) 1979-09-03 1979-09-03 Detecting method of configuration and apparatus thereof
US06/181,768 US4343553A (en) 1979-09-03 1980-08-27 Shape testing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11170679A JPS5636004A (en) 1979-09-03 1979-09-03 Detecting method of configuration and apparatus thereof

Publications (2)

Publication Number Publication Date
JPS5636004A true JPS5636004A (en) 1981-04-09
JPS6153643B2 JPS6153643B2 (enrdf_load_stackoverflow) 1986-11-19

Family

ID=14568081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11170679A Granted JPS5636004A (en) 1979-09-03 1979-09-03 Detecting method of configuration and apparatus thereof

Country Status (1)

Country Link
JP (1) JPS5636004A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS58201006A (ja) * 1982-05-20 1983-11-22 Hitachi Ltd 立体形状検出装置
JPH01240260A (ja) * 1988-03-22 1989-09-25 Okuma Mach Works Ltd 非接触式デジタイザ
US5208463A (en) * 1990-08-24 1993-05-04 Hitachi, Ltd. Method and apparatus for detecting deformations of leads of semiconductor device
US5347363A (en) * 1991-07-25 1994-09-13 Kabushiki Kaisha Toshiba External lead shape measurement apparatus for measuring lead shape of semiconductor package by using stereoscopic vision
WO2013046998A1 (ja) * 2011-09-29 2013-04-04 株式会社 日立ハイテクノロジーズ 基板に形成された形状を計測するための装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207852A (en) * 1981-05-15 1982-12-20 Siemens Ag Method of detecting three-dimensional object
JPS58201006A (ja) * 1982-05-20 1983-11-22 Hitachi Ltd 立体形状検出装置
JPH01240260A (ja) * 1988-03-22 1989-09-25 Okuma Mach Works Ltd 非接触式デジタイザ
US5208463A (en) * 1990-08-24 1993-05-04 Hitachi, Ltd. Method and apparatus for detecting deformations of leads of semiconductor device
US5347363A (en) * 1991-07-25 1994-09-13 Kabushiki Kaisha Toshiba External lead shape measurement apparatus for measuring lead shape of semiconductor package by using stereoscopic vision
WO2013046998A1 (ja) * 2011-09-29 2013-04-04 株式会社 日立ハイテクノロジーズ 基板に形成された形状を計測するための装置

Also Published As

Publication number Publication date
JPS6153643B2 (enrdf_load_stackoverflow) 1986-11-19

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