JPS5635312B2 - - Google Patents

Info

Publication number
JPS5635312B2
JPS5635312B2 JP7456877A JP7456877A JPS5635312B2 JP S5635312 B2 JPS5635312 B2 JP S5635312B2 JP 7456877 A JP7456877 A JP 7456877A JP 7456877 A JP7456877 A JP 7456877A JP S5635312 B2 JPS5635312 B2 JP S5635312B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7456877A
Other languages
Japanese (ja)
Other versions
JPS538573A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS538573A publication Critical patent/JPS538573A/ja
Publication of JPS5635312B2 publication Critical patent/JPS5635312B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11CSTATIC STORES
    • G11C16/00Erasable programmable read-only memories
    • G11C16/02Erasable programmable read-only memories electrically programmable
    • G11C16/04Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
    • G11C16/0466Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/611Insulated-gate field-effect transistors [IGFET] having multiple independently-addressable gate electrodes influencing the same channel
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00Field-effect transistors [FET]
    • H10D30/60Insulated-gate field-effect transistors [IGFET]
    • H10D30/69IGFETs having charge trapping gate insulators, e.g. MNOS transistors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00Metal treatment
    • Y10S148/156Sonos

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)
JP7456877A 1976-06-29 1977-06-24 Mnos transistor Granted JPS538573A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/701,049 US4057820A (en) 1976-06-29 1976-06-29 Dual gate MNOS transistor

Publications (2)

Publication Number Publication Date
JPS538573A JPS538573A (en) 1978-01-26
JPS5635312B2 true JPS5635312B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1981-08-15

Family

ID=24815859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7456877A Granted JPS538573A (en) 1976-06-29 1977-06-24 Mnos transistor

Country Status (2)

Country Link
US (1) US4057820A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPS538573A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539469A (en) * 1976-07-15 1978-01-27 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device having electrode of stepped structure and its production
JPS542679A (en) * 1977-06-08 1979-01-10 Mitsubishi Electric Corp Nonvoltile semiconductor memory device
US4162504A (en) * 1977-12-27 1979-07-24 Rca Corp. Floating gate solid-state storage device
EP0003413A3 (en) * 1978-01-19 1979-08-22 Sperry Corporation Improvements relating to semiconductor memories
US4277881A (en) * 1978-05-26 1981-07-14 Rockwell International Corporation Process for fabrication of high density VLSI circuits, having self-aligned gates and contacts for FET devices and conducting lines
DE2918888C2 (de) * 1979-05-10 1984-10-18 Siemens AG, 1000 Berlin und 8000 München MNOS-Speicherzelle und Verfahren zu ihrem Betrieb sowie zu ihrer Herstellung
US4334347A (en) * 1979-10-19 1982-06-15 Rca Corporation Method of forming an improved gate member for a gate injected floating gate memory device
US4253106A (en) * 1979-10-19 1981-02-24 Rca Corporation Gate injected floating gate memory device
JPS5836506B2 (ja) * 1980-11-20 1983-08-09 富士通株式会社 半導体記憶装置
JPS5891679A (ja) * 1981-11-27 1983-05-31 Hitachi Ltd 半導体装置
US4455742A (en) * 1982-06-07 1984-06-26 Westinghouse Electric Corp. Method of making self-aligned memory MNOS-transistor
JPS5955071A (ja) * 1982-09-24 1984-03-29 Hitachi Micro Comput Eng Ltd 不揮発性半導体装置
JPS6076766U (ja) * 1983-10-31 1985-05-29 岩堀 富久生 ガスライタ
US4881313A (en) * 1988-02-03 1989-11-21 Cuno, Incorporated Method of forming a cell filter with an exposed surface
US20060226467A1 (en) * 2005-04-07 2006-10-12 Macronix International Co., Ltd. P-channel charge trapping memory device with sub-gate

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1136569A (en) * 1965-12-22 1968-12-11 Mullard Ltd Insulated gate field effect transistors
US3633078A (en) * 1969-10-24 1972-01-04 Hughes Aircraft Co Stable n-channel tetrode

Also Published As

Publication number Publication date
JPS538573A (en) 1978-01-26
US4057820A (en) 1977-11-08

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