JPS5634857B2 - - Google Patents

Info

Publication number
JPS5634857B2
JPS5634857B2 JP4540973A JP4540973A JPS5634857B2 JP S5634857 B2 JPS5634857 B2 JP S5634857B2 JP 4540973 A JP4540973 A JP 4540973A JP 4540973 A JP4540973 A JP 4540973A JP S5634857 B2 JPS5634857 B2 JP S5634857B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4540973A
Other languages
Japanese (ja)
Other versions
JPS49131681A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4540973A priority Critical patent/JPS5634857B2/ja
Publication of JPS49131681A publication Critical patent/JPS49131681A/ja
Publication of JPS5634857B2 publication Critical patent/JPS5634857B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP4540973A 1973-04-20 1973-04-20 Expired JPS5634857B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4540973A JPS5634857B2 (enrdf_load_stackoverflow) 1973-04-20 1973-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4540973A JPS5634857B2 (enrdf_load_stackoverflow) 1973-04-20 1973-04-20

Publications (2)

Publication Number Publication Date
JPS49131681A JPS49131681A (enrdf_load_stackoverflow) 1974-12-17
JPS5634857B2 true JPS5634857B2 (enrdf_load_stackoverflow) 1981-08-13

Family

ID=12718444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4540973A Expired JPS5634857B2 (enrdf_load_stackoverflow) 1973-04-20 1973-04-20

Country Status (1)

Country Link
JP (1) JPS5634857B2 (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179575A (enrdf_load_stackoverflow) * 1975-01-06 1976-07-10 Hitachi Ltd
JPS5366376A (en) * 1976-11-26 1978-06-13 Fujitsu Ltd Photo mask
JPS5950444A (ja) * 1982-09-16 1984-03-23 Tokyo Ohka Kogyo Co Ltd 微細加工用ホトマスク
JPS60128449A (ja) * 1983-12-15 1985-07-09 Hoya Corp フオトマスクとその製造方法
JPS62235953A (ja) * 1986-04-07 1987-10-16 Fuotopori Ouka Kk ホトマスク
US5051295A (en) * 1987-08-10 1991-09-24 Idemitsu Petrochemical Company Limited Protective film for photo masks and lith films

Also Published As

Publication number Publication date
JPS49131681A (enrdf_load_stackoverflow) 1974-12-17

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