JPS5634857B2 - - Google Patents

Info

Publication number
JPS5634857B2
JPS5634857B2 JP4540973A JP4540973A JPS5634857B2 JP S5634857 B2 JPS5634857 B2 JP S5634857B2 JP 4540973 A JP4540973 A JP 4540973A JP 4540973 A JP4540973 A JP 4540973A JP S5634857 B2 JPS5634857 B2 JP S5634857B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4540973A
Other languages
Japanese (ja)
Other versions
JPS49131681A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4540973A priority Critical patent/JPS5634857B2/ja
Publication of JPS49131681A publication Critical patent/JPS49131681A/ja
Publication of JPS5634857B2 publication Critical patent/JPS5634857B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP4540973A 1973-04-20 1973-04-20 Expired JPS5634857B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4540973A JPS5634857B2 (en) 1973-04-20 1973-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4540973A JPS5634857B2 (en) 1973-04-20 1973-04-20

Publications (2)

Publication Number Publication Date
JPS49131681A JPS49131681A (en) 1974-12-17
JPS5634857B2 true JPS5634857B2 (en) 1981-08-13

Family

ID=12718444

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4540973A Expired JPS5634857B2 (en) 1973-04-20 1973-04-20

Country Status (1)

Country Link
JP (1) JPS5634857B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5179575A (en) * 1975-01-06 1976-07-10 Hitachi Ltd
JPS5366376A (en) * 1976-11-26 1978-06-13 Fujitsu Ltd Photo mask
JPS5950444A (en) * 1982-09-16 1984-03-23 Tokyo Ohka Kogyo Co Ltd Photomask for microfabrication
JPS60128449A (en) * 1983-12-15 1985-07-09 Hoya Corp Photomask and its manufacture
JPS62235953A (en) * 1986-04-07 1987-10-16 Fuotopori Ouka Kk Photomask
EP0328648A4 (en) * 1987-08-10 1991-05-15 Idemitsu Petrochemical Company Limited Durable patterning member

Also Published As

Publication number Publication date
JPS49131681A (en) 1974-12-17

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