JPS5634857B2 - - Google Patents
Info
- Publication number
- JPS5634857B2 JPS5634857B2 JP4540973A JP4540973A JPS5634857B2 JP S5634857 B2 JPS5634857 B2 JP S5634857B2 JP 4540973 A JP4540973 A JP 4540973A JP 4540973 A JP4540973 A JP 4540973A JP S5634857 B2 JPS5634857 B2 JP S5634857B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4540973A JPS5634857B2 (en) | 1973-04-20 | 1973-04-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4540973A JPS5634857B2 (en) | 1973-04-20 | 1973-04-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS49131681A JPS49131681A (en) | 1974-12-17 |
JPS5634857B2 true JPS5634857B2 (en) | 1981-08-13 |
Family
ID=12718444
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4540973A Expired JPS5634857B2 (en) | 1973-04-20 | 1973-04-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5634857B2 (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5179575A (en) * | 1975-01-06 | 1976-07-10 | Hitachi Ltd | |
JPS5366376A (en) * | 1976-11-26 | 1978-06-13 | Fujitsu Ltd | Photo mask |
JPS5950444A (en) * | 1982-09-16 | 1984-03-23 | Tokyo Ohka Kogyo Co Ltd | Photomask for microfabrication |
JPS60128449A (en) * | 1983-12-15 | 1985-07-09 | Hoya Corp | Photomask and its manufacture |
JPS62235953A (en) * | 1986-04-07 | 1987-10-16 | Fuotopori Ouka Kk | Photomask |
EP0328648A4 (en) * | 1987-08-10 | 1991-05-15 | Idemitsu Petrochemical Company Limited | Durable patterning member |
-
1973
- 1973-04-20 JP JP4540973A patent/JPS5634857B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS49131681A (en) | 1974-12-17 |