JPS5634090B2 - - Google Patents
Info
- Publication number
- JPS5634090B2 JPS5634090B2 JP14072675A JP14072675A JPS5634090B2 JP S5634090 B2 JPS5634090 B2 JP S5634090B2 JP 14072675 A JP14072675 A JP 14072675A JP 14072675 A JP14072675 A JP 14072675A JP S5634090 B2 JPS5634090 B2 JP S5634090B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
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- Weting (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072675A JPS5264879A (en) | 1975-11-26 | 1975-11-26 | Removal of silicon deposited on semiconductor treating parts |
| GB35164/76A GB1573206A (en) | 1975-11-26 | 1976-08-24 | Method of trating surfaces of intermediate products obtained in the manufacture of semiconductor devices |
| GB1904/79A GB1573208A (en) | 1975-11-26 | 1976-08-24 | Surface treating agent adapted for intermediate products of a semiconductor device |
| NLAANVRAGE7609602,A NL185116C (nl) | 1975-11-26 | 1976-08-30 | Werkwijze voor het behandelen van oppervlakken van tussenprodukten bij het vervaardigen van halfgeleiders. |
| DE2639004A DE2639004C2 (de) | 1975-11-26 | 1976-08-30 | Wäßrige Lösung zur Oberflächenbehandlung von Zwischenprodukten bei der Herstellung von Halbleiterbauelementen |
| US05/927,139 US4239661A (en) | 1975-11-26 | 1978-07-21 | Surface-treating agent adapted for intermediate products of a semiconductor device |
| US06/213,317 US4339340A (en) | 1975-11-26 | 1980-12-05 | Surface-treating agent adapted for intermediate products of a semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14072675A JPS5264879A (en) | 1975-11-26 | 1975-11-26 | Removal of silicon deposited on semiconductor treating parts |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5264879A JPS5264879A (en) | 1977-05-28 |
| JPS5634090B2 true JPS5634090B2 (member.php) | 1981-08-07 |
Family
ID=15275269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14072675A Granted JPS5264879A (en) | 1975-11-26 | 1975-11-26 | Removal of silicon deposited on semiconductor treating parts |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5264879A (member.php) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5876954U (ja) * | 1981-11-16 | 1983-05-24 | 株式会社日立製作所 | 端末装置 |
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1975
- 1975-11-26 JP JP14072675A patent/JPS5264879A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5264879A (en) | 1977-05-28 |