JPS5632364A - Manufacture of target ceramic for high frequence sputtering - Google Patents
Manufacture of target ceramic for high frequence sputteringInfo
- Publication number
- JPS5632364A JPS5632364A JP10528579A JP10528579A JPS5632364A JP S5632364 A JPS5632364 A JP S5632364A JP 10528579 A JP10528579 A JP 10528579A JP 10528579 A JP10528579 A JP 10528579A JP S5632364 A JPS5632364 A JP S5632364A
- Authority
- JP
- Japan
- Prior art keywords
- sputtering
- manufacture
- target ceramic
- high frequence
- frequence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54105285A JPS5851906B2 (en) | 1979-08-17 | 1979-08-17 | Method for manufacturing target porcelain for high frequency sputtering |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP54105285A JPS5851906B2 (en) | 1979-08-17 | 1979-08-17 | Method for manufacturing target porcelain for high frequency sputtering |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5632364A true JPS5632364A (en) | 1981-04-01 |
JPS5851906B2 JPS5851906B2 (en) | 1983-11-18 |
Family
ID=14403397
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP54105285A Expired JPS5851906B2 (en) | 1979-08-17 | 1979-08-17 | Method for manufacturing target porcelain for high frequency sputtering |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5851906B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105565798A (en) * | 2015-12-18 | 2016-05-11 | 广东风华高新科技股份有限公司 | Preparation method of zinc oxide target and preparation method of zinc oxide film |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01129044U (en) * | 1988-02-24 | 1989-09-04 |
-
1979
- 1979-08-17 JP JP54105285A patent/JPS5851906B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105565798A (en) * | 2015-12-18 | 2016-05-11 | 广东风华高新科技股份有限公司 | Preparation method of zinc oxide target and preparation method of zinc oxide film |
Also Published As
Publication number | Publication date |
---|---|
JPS5851906B2 (en) | 1983-11-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5495984A (en) | Manufacture of coolable sputtering target | |
MY8500489A (en) | Magnetron sputtering of ferromagnatic material | |
GB2049664B (en) | Preparation of monacolin k | |
AU5763680A (en) | Grouping rows of bricks | |
YU286879A (en) | Process for the manufacture of ceramic thermoaccumulation bricks | |
JPS55116665A (en) | Manufacture of heat resisting ceramic product | |
JPS568210A (en) | Preparation of ceramic product | |
AU537107B2 (en) | Method of firing clay or refractories | |
GB2047224B (en) | Manufacture of ceramic ware | |
JPS5632364A (en) | Manufacture of target ceramic for high frequence sputtering | |
JPS5370047A (en) | Preparation of target material for sputtering | |
GB2004044B (en) | Method for the manufacture of ceramic products | |
JPS569286A (en) | Manufacture of ceramic | |
AU5644880A (en) | Metal encased ceramic bricks | |
JPS55113662A (en) | Manufacture of low temperature burned ceramic | |
JPS55113676A (en) | Manufacture of ceramic product | |
JPS55123413A (en) | Preparation of ceramic burned product | |
JPS5696782A (en) | Manufacture of refractories | |
JPS5663868A (en) | Manufacture of carbonncontaining magnesiaaalumina brick | |
JPS5614472A (en) | Manufacture of highhfrequency sputtring target ceramic | |
JPS569285A (en) | Manufacture of ceramic | |
JPS55149170A (en) | Manufacture of magnesiaaspinel brick | |
SU638570A1 (en) | Ceramic mass for making tiles | |
JPS569284A (en) | Manufacture of ceramic | |
JPS55100267A (en) | Production of high temperature resistant low expanding ceramics |